Results 121 to 130 of about 5,727 (200)

A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array. [PDF]

Microsyst Nanoeng
Wang F, Ouyang X, Hong L, Song X, Xu W.
europepmc   +1 more source

Performance enhancement of electrochemical discharge micromachining of borosilicate glass using nitrogen gas assistance. [PDF]

Sci Rep
Tamilperuvalathan S, Varadharaju V, Rajamohan S, Balasubramanian D, Kale U, Kilikevičius A.   +5 more
europepmc   +1 more source

Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices. [PDF]

Microsyst Nanoeng
Yu J, Li F, Sun H, Zhu Y, Shi Y, Wang R, Du L, Li Y, Wu M, Liu J.   +9 more
europepmc   +1 more source

Micromachines

Micromachines, 2023
openaire   +2 more sources

Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing. [PDF]

Microsyst Nanoeng
Wu C, Fang X, Sun H, Zhang Z, Shi M, Liu Z, Fang Z, Yan Y, Kang Q, Maeda R, Tian B, Zhao L, Jiang Z.   +12 more
europepmc   +1 more source

Micromachines

IEEJ Transactions on Sensors and Micromachines, 1995
openaire   +2 more sources

Editorial for the Special Issue on Fabrication, Characterization and Application of Organic/Inorganic Film Membranes and Advanced Materials (Volume II). [PDF]

Membranes (Basel)
Kalinina E.
europepmc   +1 more source

Advances in Laser Processing Technology of Materials. [PDF]

Materials (Basel)
De Palo R, Volpe A.
europepmc   +1 more source

Mask-guided microbial jet machining for functionalized textured interface fabrication. [PDF]

Sci Rep
Ruan J, Wang X, Wang Y, Zou W.
europepmc   +1 more source

High-Frequency 64-Element Ring-Annular Array Transducer: Development and Preclinical Validation for Intravascular Ultrasound Imaging. [PDF]

Biosensors (Basel)
Liu X, Li Y, Qin H, Peng C.
europepmc   +1 more source