Multi-Scale Modeling and Experimental Validation of Thermo-Mechanical Responses in Femtosecond Laser Micromachining of Copper. [PDF]
Zhao J, Han X, Dong F, Liu S.
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A Flexible Copper Electrode Array for High-Density Surface Electromyography. [PDF]
Li C, Lu C, Li J, Guo K.
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FEM-Based Design and Micromachining of a Ratchet Click Mechanism in Mechanical Watch Movements. [PDF]
Metelli A +3 more
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A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array. [PDF]
Wang F, Ouyang X, Hong L, Song X, Xu W.
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Performance enhancement of electrochemical discharge micromachining of borosilicate glass using nitrogen gas assistance. [PDF]
Tamilperuvalathan S +5 more
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Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review. [PDF]
Welburn L +3 more
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Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices. [PDF]
Yu J +9 more
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Self-sacrificial surface-micromachining using Poly(methyl methacrylate) [PDF]
Johnstone, Robert W.
core
Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing. [PDF]
Wu C +12 more
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