Results 171 to 180 of about 15,564 (252)

Micromachines

open access: yesIEEJ Transactions on Sensors and Micromachines, 1995
openaire   +2 more sources

Performance enhancement of electrochemical discharge micromachining of borosilicate glass using nitrogen gas assistance. [PDF]

open access: yesSci Rep
Tamilperuvalathan S   +5 more
europepmc   +1 more source

Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices. [PDF]

open access: yesMicrosyst Nanoeng
Yu J   +9 more
europepmc   +1 more source

Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing. [PDF]

open access: yesMicrosyst Nanoeng
Wu C   +12 more
europepmc   +1 more source

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