Results 171 to 180 of about 19,596 (227)

A Flexible Copper Electrode Array for High-Density Surface Electromyography. [PDF]

Bioengineering (Basel)
Li C, Lu C, Li J, Guo K.
europepmc   +1 more source

Self-sacrificial surface-micromachining using Poly(methyl methacrylate) [PDF]

, 2008
Johnstone, Robert W.
core  

Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review. [PDF]

Biomolecules
Welburn L, Javadi AMM, Nguyen L, Desai S.   +3 more
europepmc   +1 more source

A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array. [PDF]

Microsyst Nanoeng
Wang F, Ouyang X, Hong L, Song X, Xu W.
europepmc   +1 more source

Performance enhancement of electrochemical discharge micromachining of borosilicate glass using nitrogen gas assistance. [PDF]

Sci Rep
Tamilperuvalathan S, Varadharaju V, Rajamohan S, Balasubramanian D, Kale U, Kilikevičius A.   +5 more
europepmc   +1 more source

Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices. [PDF]

Microsyst Nanoeng
Yu J, Li F, Sun H, Zhu Y, Shi Y, Wang R, Du L, Li Y, Wu M, Liu J.   +9 more
europepmc   +1 more source

Correction: Kang et al. Fluid Flow to Electricity: Capturing Flow-Induced Vibrations with Micro-Electromechanical-System-Based Piezoelectric Energy Harvester. <i>Micromachines</i> 2024, <i>15</i>, 581. [PDF]

Micromachines (Basel)
Kang JG, Kim H, Shin S, Kim BS.
europepmc   +1 more source

Multifunctional Flipping-Based Mechanical Metasurface Enabling Optical-Microwave Dual-Modal Reconfigurability. [PDF]

Adv Mater
Huang S, Cai ZX, Li XY, Chen L, Xu J, Liang JY, Bao JH, Liu C, You JW.   +8 more
europepmc   +1 more source

High speed biaxial piezoelectric MEMS micromirror with varifocal tunability. [PDF]

Microsyst Nanoeng
Shillingburg H, Lopez D.
europepmc   +1 more source

Giant piezoelectric response and electromechanical coupling in AlScN thin films via multi-scale lattice engineering. [PDF]

Nat Commun
Cheng Z, Liu T, Su D, Yang C, Wu C, Liu Y, Sun W, Huang S, Cheng Z.   +8 more
europepmc   +1 more source