Results 181 to 190 of about 5,727 (200)
Some of the next articles are maybe not open access.
The compatibility of ZnO piezoelectric film with micromachining process
Sensors and Actuators A: Physical, 2003Yilong Hao, Guoying Wu
exaly
Mechanical micromachining: a sustainable micro-device manufacturing approach?
Journal of Cleaner Production, 2009exaly
Experimental study on electrochemical micromachining
Journal of Materials Processing Technology, 2005exaly
Nanoparticle impact micromachining
Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1997exaly

