Results 201 to 210 of about 15,564 (252)

Read my LIPSS: organic lasers on micromachined resonators. [PDF]

open access: yesNat Commun
Dong T   +8 more
europepmc   +1 more source

Recent Design and Application Advances in Micro-Electro-Mechanical System (MEMS) Electromagnetic Actuators. [PDF]

open access: yesMicromachines (Basel)
Cheng J   +8 more
europepmc   +1 more source

Surface micromachining

open access: yes, 2010
Surface Micromachining is called so because instead of crystal silicon substrate as functioning material this new technology uses thin film layers deposited on the substrate surface as functioning material. This chapter explains the different types of surface micromachining processes.
Leinenbach, Christina   +2 more
openaire   +2 more sources

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