Results 31 to 40 of about 2,189 (167)
Performance-increasing technique in micromechanical accelerometer development
Journal of Physics: Conference Series, 2020 Abstract Requirements for higher-performance on-board control systems and instruments applied in a variety of small-scale moving objects results in the necessity to develop micromechanical sensors – small, lightweight, energy-efficient and, at the same time, offering high-reliability performance and easy-to-use.
D Yu Ershov, I N Lukyanenko, E E Aman
openaire +1 more source
A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics. [PDF]
, 2017 For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz1/2 resolution levels.
Cai, Ziqiang +7 more
core +1 more source
Single-mask thermal displacement sensor in MEMS [PDF]
, 2010 In this work we describe a one degree-of-freedom microelectromechanical thermal\ud displacement sensor integrated with an actuated stage. The system was fabricated in the device layer of a silicon-on-insulator wafer using a single-mask process.
Abelmann, L. +5 more
core +7 more sources
Microaccelerometer on Surface Acoustic Waves with a Ring Resonator on Anisotropic Material
Известия высших учебных заведений России: Радиоэлектроника, 2019 Introduction. Diagnostic systems are designed to monitor the condition of operational components (for example, on the railway). It is imperative that micro-electromechanical systems (MEMS) equipped with acceleration sensors (accelerometers) be used as ...
Dmitry P. Lukyanov +4 more
doaj +1 more source
Implementation aspects and offline digital signal processing of a smart pebble for river bed sediment transport monitoring [PDF]
, 2006 Conceptualization aspects of a smart sediment particle (smart pebble) for monitoring of sediment transport in riverbeds have been documented previously [1].
Kularatna, Nihal +2 more
core +2 more sources
PARAMETRIC AMPLIFICATION OF THE SIGNALS IN THE ELECTROSTATIC GRAVIINERTIAL SENSOR
Приборы и методы измерений, 2017 The challenges of designing simple, reliable, and high sensitivity graviinertial sensors are investigated. The sensor comprises a proof mass (PM) and is fixed with the housing by the elastic torsion suspension.
I. Z. Gilavdary +2 more
doaj +1 more source
Micro systems technology [PDF]
, 1994 The emerging field of Micro Systems Technology is described. Micro Systems Technology can be seen as the meeting of disciplines, a product of convergence along different lines.
Fluitman, Jan H.J
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Advanced Engineering Materials, Volume 28, Issue 1, January 2026.The puncture prevention and energy absorption performance of composite metal foam (CMF) are studied experimentally and numerically for hazardous materials transportation protection. The numerical model implementing air within the CMF (nonhomogeneous model using fluid cavity technique) predicts puncture more accurately compared to the homogeneous CMF ...
Aman Kaushik, Afsaneh Rabiei
wiley +1 more source
Microsystems technology: objectives [PDF]
, 1996 This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is.
Fluitman, Jan
core +2 more sources
Advanced Engineering Materials, Volume 27, Issue 20, October 2025.This review explores wafer bonding technologies, covering wafer preparation, activation methods, and bonding mechanisms. It compares direct and indirect bonding, highlights recent advancements and future trends, and examines applications in 3D integration and packaging.
Abdul Ahad Khan +5 more
wiley +1 more source