Results 51 to 60 of about 2,210 (181)
Oxide Membranes from Bulk Micro‐Machining of SrTiO3 Substrates
Advanced Science, Volume 12, Issue 20, May 29, 2025.Bulk‐micromachining of SrTiO3 substrates is employed to realize suspended structures made of epitaxial thin films of complex oxides such as trampoline resonators and sealed membranes with physical access from both sides. The fabrication protocol relies on wet chemical etching of SrTiO3 and uses (La,Sr)MnO3 as hard mask and device layers.
Nicola Manca +6 more
wiley +1 more source
The results of modelling of a micromechanical accelerometer
Journal of Physics: Conference Series, 2019 Abstract This theses the linear acceleration sensor design with three axis of sensitivity is researched. Parameterized geometry and finite element model for modal analysis are developed in the ANSYS program. Behavioral description of the study design is developed with language VHDL-AMS to simulate the sensor operation under the influence
I E Lysenko +5 more
openaire +1 more source
International Journal for Numerical Methods in Engineering, Volume 126, Issue 3, 15 February 2025.ABSTRACT This article presents the first application of the direct parametrisation method for invariant manifolds to a fully coupled multiphysics problem involving the nonlinear vibrations of deformable structures subjected to an electrostatic field. The formulation proposed is intended for model order reduction of electrostatically actuated resonating
Attilio Frangi +3 more
wiley +1 more source
Microsystems technology: objectives [PDF]
, 1996 This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is.
Fluitman, Jan
core +2 more sources
Emerging Wearable Acoustic Sensing Technologies
Advanced Science, Volume 12, Issue 6, February 10, 2025.This review summarizes recent advancements in wearable acoustic devices developed through interdisciplinary and bionic approaches. These applications include bio‐acoustic detection, ultrasound energy supply, and ultrasonic diagnosis. It highlights challenges and future directions, aiming to promote their use in the human body and explore integration ...
Tao Liu +7 more
wiley +1 more source
A novel method for fatigue testing of MEMS devices containing movable elements [PDF]
, 2007 In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique.
Rencz, M., Szucs, Z.
core +1 more source
IC-integrated flexible shear-stress sensor skin [PDF]
, 2003 This paper reports the successful development of the first IC-integrated flexible MEMS shear-stress sensor skin. The sensor skin is 1 cm wide, 2 cm long, and 70 /spl mu/m thick. It contains 16 shear-stress sensors, which are arranged in a 1-D array, with
Ho, Chih-Ming +3 more
core +1 more source
Advanced Sustainable Systems, Volume 8, Issue 12, December 2024.This review presents the critical discussion and systematic review on progressive development of triboelectric nanogenerators in the self‐powered machine condition monitoring. The review, summarize the state of the art in structural design optimization, mechanical energy harvesting, sensing, devices, and system of TENG in perspective of self‐powered ...
Idiris Mehamud +4 more
wiley +1 more source
IET Science, Measurement &Technology, Volume 18, Issue 4, Page 145-162, June 2024.First, this article introduces the application status and technical requirements of power intelligent sensor technology in various aspects of the power system, including the generation, transmission, transformation, distribution, and consumption of electricity.
Peng Li +8 more
wiley +1 more source
Optomechanical position detection enhanced by de-amplification using intracavity squeezing
, 2015 It has been predicted and experimentally demonstrated that by injecting squeezed light into an optomechanical device it is possible to enhance the precision of a position measurement.
Marquardt, Ch. +3 more
core +1 more source