Results 71 to 80 of about 2,210 (181)
Chip-scale cavity optomechanics in lithium niobate
We develop a chip-scale cavity optomechanical system in single-crystal lithium niobate that exhibits high optical quality factors and a large frequency-quality product as high as $3.6\times 10^{12}$ Hz at room temperature and atmosphere.
Jiang, Wei C., Lin, Qiang
core +1 more source
From MEMS to NEMS: closed-loop actuation of resonant beams beyond the critical Duffing amplitude [PDF]
International audienceBecause of its moderate cost in terms of electronics, resonant sensing has become commonplace in the context of MEMS and NEMS devices.
Alain, Bonnoit +5 more
core +3 more sources
Single-mask thermal displacement sensor in MEMS [PDF]
In this work we describe a one degree-of-freedom microelectromechanical thermal\ud displacement sensor integrated with an actuated stage. The system was fabricated in the device layer of a silicon-on-insulator wafer using a single-mask process.
Abelmann, L. +5 more
core +2 more sources
Hybrid confinement of optical and mechanical modes in a bullseye optomechanical resonator [PDF]
Optomechanical cavities have proven to be an exceptional tool to explore fundamental and technological aspects of the interaction between mechanical and optical waves.
Alegre, Thiago P. Mayer +5 more
core +2 more sources
Whether intentionally introduced to exert control over particles and macroscopic objects, such as for trapping or cooling, or whether arising from the quantum and thermal fluctuations of charges in otherwise neutral bodies, leading to unwanted stiction ...
Capasso, Federico +5 more
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The architecture and building possibilities of attitude system of unmanned and ultralight air vehicles based on modern inertial sensors are considered.
Y.A. BATISHCHEV +3 more
doaj
The architecture and building possibilities of attitude system of unmanned and ultralight air vehicles based on modern inertial sensors are considered.
Y.A. BATISHCHEV +3 more
doaj
Electromechanical Reliability Testing of Three-Axial Silicon Force Sensors [PDF]
This paper reports on the systematic electromechanical characterization of a new three-axial force sensor used in dimensional metrology of micro components. The siliconbased sensor system consists of piezoresistive mechanicalstress transducers integrated
Bartholomeyczik, J. +8 more
core +1 more source
Research on Surface Mounting Technology of Micromechanical Silicon Resonant Accelerometer
Surface mounting technology is a key process in MEMS packaging. The finite element model of package structures was established in this paper according to the designed micromechanical silicon resonant accelerometer. The effects of package substrate materials, adhesive material characteristics, uneven adhesive thickness, and adhesive defects on the ...
Libin Huang, Yang Gao
openaire +1 more source
Прибор контроля пространственного положения человека на базе микромеханического инерциального модуля [PDF]
В статье рассматривается прибор контроля пространственного положения человека на базеМЭМС датчиков, своего рода миниатюрная навигационная система. Прибор содержит микромеханическиеинерциальные модули, вычислительный блок, радиоканал приема и передачи ...
Zorina, E. V.
core

