Results 71 to 80 of about 2,189 (167)
Nanonewton force generation and detection based on a sensitive torsion pendulum
, 2008 In this paper, we introduce the experiment based on a sensitive torsion pendulum for measuring and calibrating small forces at nanonewton scale. The force standard for calibration is the universal gravitation between four masses separated by known ...
Chen, Sheng-Jui, Pan, Sheau-Shi
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Testing of the sensing element of a capacitive micromechanical accelerometer
Journal of Physics: Conference Series, 2020 Abstract Sensing element is one of the main parts of a micromechanical accelerometer. It determines a lot of parameters of the whole device. Its design flow is a complex process including the steps from the analysis of technical and technological requirements to testing the manufactured devices. Testing is one of the most important steps
A.V. Styazhkina +4 more
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Interconnect Challenges in Highly Integrated MEMS/ASIC Subsystems [PDF]
, 2007 Micromechanical devices like accelerometers or rotation sensors form an increasing segment beneath the devices supplying the consumer market. A hybrid integration approach to build smart sensor clusters for the precise detection of movements in all ...
Marenco, N., Reinert, W., Warnat, S.
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Curvature of BEOL cantilevers in CMOS-MEMS processes [PDF]
, 2017 © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new ...
Barrachina, Laura +3 more
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, 2014 Whether intentionally introduced to exert control over particles and macroscopic objects, such as for trapping or cooling, or whether arising from the quantum and thermal fluctuations of charges in otherwise neutral bodies, leading to unwanted stiction ...
Capasso, Federico +5 more
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Вестник Донского государственного технического университета, 2018 The architecture and building possibilities of attitude system of unmanned and ultralight air vehicles based on modern inertial sensors are considered.
Y.A. BATISHCHEV +3 more
doaj
Advanced Engineering Research, 2010 The architecture and building possibilities of attitude system of unmanned and ultralight air vehicles based on modern inertial sensors are considered.
Y.A. BATISHCHEV +3 more
doaj
Research on Surface Mounting Technology of Micromechanical Silicon Resonant Accelerometer
TELKOMNIKA Indonesian Journal of Electrical Engineering, 2013 Surface mounting technology is a key process in MEMS packaging. The finite element model of package structures was established in this paper according to the designed micromechanical silicon resonant accelerometer. The effects of package substrate materials, adhesive material characteristics, uneven adhesive thickness, and adhesive defects on the ...
Libin Huang, Yang Gao
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Design of Temperature Sensitive Structure for Micromechanical Silicon Resonant Accelerometer
2017 International Conference on Computer Network, Electronic and Automation (ICCNEA), 2017 A micromechanical silicon resonant accelerometer (MSRA) is a potential micro accelerometer with high accuracy. One of the most important factors affecting its performance is temperature. To research the effect of temperature on micromechanical silicon resonant accelerometer, this study based on the original micromechanical silicon resonant ...
Li, Heng +3 more
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Микропроцессорная система измерения углов ориентации объекта на основе микромеханического акселерометра [PDF]
, 2010 Представлено результати розробки мікропроцесорної системи виміру кутів орієнтації об’єкту на основі мікромеханічного акселерометра ADXL-203. Розглянуто конструкція, алгоритм роботи, метод калібрування математична модель похибок та результати випробувань ...
Chernyak, K. N. +5 more
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