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Crack Initiation in Machining Monocrystalline Silicon

CIRP Annals, 1999
Abstract Based on the discussion in which the defect as a source of cracks must be created during cutting a silicon monocrystal, the renormalization group molecular dynamics has been proposed to simulate the defect initiation process. The method can be applied to a model of micrometer size, which is necessary to bring about brittle mode cutting, and ...
T. Inamura   +3 more
openaire   +1 more source

THE PLASTICITY OF MONOCRYSTALLINE SILICON UNDER NANOINDENTATION

International Journal of Modern Physics B, 2008
This paper focuses on a fundamental understanding of the plastic deformation mechanism in monocrystalline silicon subjected to nanoindentation. It was found that over a wide range of indentation loads from 100 μN to 30 mN and loading/unloading rates from 3.3 μN/s to 10 mN/s, the plasticity of silicon is mainly caused by stress-induced phase ...
LI CHANG, L. C. ZHANG
openaire   +1 more source

Horizontal buried channels in monocrystalline silicon

Microsystem Technologies, 2006
This paper reports, horizontal buried channels in monocrystalline silicon. Those channels are few microns wide and height and several hundred microns long. The main applications for those buried channels are micro-fluidic networks for MEMS devices and cooling systems for integrated circuits.
de Sagazan, Olivier   +4 more
openaire   +3 more sources

MD Simulations of Nanomachining Monocrystalline Silicon

Key Engineering Materials, 2015
Molecular dynamics (MD) simulations of nanomachining of monocrystalline silicon were performed with the aid of Tersoff potential. The effects of machining conditions on the nature of heat distribution and corresponding phase transformation during nanomachining were investigated.
openaire   +1 more source

Monocrystalline-Silicon Microwave MEMS Devices

2010
Monocrystalline silicon is still the material of first choice for robust MEMS devices, because of its excellent mechanical strength and elasticity, and the large variety of available standard processes. Conventional RF MEMS components consist of thin-film metal structures which are prone to plastic deformation and limit the power handling.
Joachim Oberhammer   +2 more
openaire   +1 more source

Research on Charge Transfer Characteristics Induced by Laser Irradiation Monocrystalline Silicon

International Journal of Thermophysics, 2020
Yafei Han, Ling Tang
exaly  

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