Results 201 to 210 of about 5,555 (236)
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IEEE Transactions on Automation Science and Engineering
The achievable performance with repetitive control is limited due to its inherent sensitivity to the frequency shift away from the intended periodic frequencies and the undesired gain amplification of the aperiodic disturbances.
Linlin Li +4 more
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The achievable performance with repetitive control is limited due to its inherent sensitivity to the frequency shift away from the intended periodic frequencies and the undesired gain amplification of the aperiodic disturbances.
Linlin Li +4 more
semanticscholar +1 more source
IEEE/ASME transactions on mechatronics
Establishing efficient and accurate analytical models for the normal-stressed electromagnetic actuators (NSEAs) is crucial for optimizing the magnetic stages to achieve desired working performance.
Yan-Ning Fang +3 more
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Establishing efficient and accurate analytical models for the normal-stressed electromagnetic actuators (NSEAs) is crucial for optimizing the magnetic stages to achieve desired working performance.
Yan-Ning Fang +3 more
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Nanotube multi-functional nanoposition sensors
Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems, 2005Prototypes of indvidual carbon-nanotube-based nanoposition sensors for detercting approaching, touching, and sliding positions are presented on the bases of the interelectrodedistance-based field emission current change of a nanotube emitterand the resistance change caused by sliding motion of nanotube on an Au substrate.
P Liu, L Dong, F Arai, T Fukuda
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Position Sensors for Nanopositioning
2016Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution, and speed of the machine, the sensor performance is a foremost consideration.
Andrew J. Fleming, Kam K. Leang
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Embedded Capacitive Displacement Sensor for Nanopositioning Applications
IEEE Transactions on Instrumentation and Measurement, 2010The scale of nano objects requires very precise position determination. The state-of-the-art manipulators involve accurate nanometer positioning. This paper presents the design of a capacitive displacement sensor for a nanopositioning application. The challenges of designing a capacitor sensitive to nanometer movements that fits in the area of a few ...
Svetlana Avramov-Zamurovic +5 more
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Tracking Control for Nanopositioning Systems
2016The performance of nanopositioning systems is greatly affected by their mechanical dynamics, and for piezo-actuated designs, induced structural vibration, hysteresis, and creep can drastically limit positioning precision. Therefore, tracking control, both feedback and feedforward control, plays an important role in achieving high-performance operation,
Kam K. Leang, Andrew J. Fleming
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2DOF Control Design for Nanopositioning
2011This chapter will focus on control systems theoretic analysis and synthesis that significantly expand the range of performance specifications and positioning capabilities of scanning probe microscopes (SPMs).We will present a systems theory framework to study fundamental limitations on the performance of one and two degree-of-freedom (DOF) control ...
Chibum Lee +2 more
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A Six-DOF Micro-/Nanopositioning System
2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2018Motivated by the requirement of developing a high resolution, high precision and low parasitic motion positioning stage for spatial micro-/nanomanipulation, a six- DOF parallel flexure mechanism was analyzed in this paper. Tens of micrometers travel range and tens of nanometers resolution can be achieved. The stage has three flexible parallel limbs. To
Defu Zhang +8 more
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Improving piezo actuators for nanopositioning tasks
Laser-based Micro- and Nanoprocessing XII, 2018In recent years, numerous applications emerged on the market with seemingly contradicting demands. On one side, the structure size decreased while on the other side, the overall sample size and speed of operation increased. Although the principle usage of piezoelectric positioning solutions has become a standard in the field of micro- and ...
Vassil Gramov +2 more
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MEMS for Nanopositioning: Design and Applications
Journal of Microelectromechanical Systems, 2017Nanopositioners are high-precision mechatronic devices that are capable of generating mechanical motion with nanometer or sub-nanometer resolution. With this motion typically being available over mechanical bandwidths of several kilohertz or greater, nanopositioners have become important tools for many areas of nanotechnology.
Mohammad Maroufi +2 more
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