Results 181 to 190 of about 4,098 (213)

Nanopositioning for Lithography and Data Storage

2016
The history of the science shows that there is usually one strong social demand behind a new technology. The new technology, which can solve the key problem, must be got people’s praise and attraction. Nanotechnology is also facing the similar historical opportunity.
Wenbo Zhang, Ming Pang, Changhai Ru
openaire   +1 more source

Phase leading active disturbance rejection control for a nanopositioning stage

ISA Transactions, 2021
Wei Wei, Min Zuo
exaly  

OEM nanopositioning

Smart Materials Bulletin, 2002
openaire   +1 more source

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

IEEE Transactions on Automation Science and Engineering, 2016
Li-Min Zhu, Chun-Yi Su, Han Ding
exaly  

A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics

Mechanical Systems and Signal Processing, 2018
Wu-Le Zhu, Zhiwei Zhu, Ping Guo
exaly  

Nanopositioning

2006
openaire   +1 more source

A Survey of Control Issues in Nanopositioning

IEEE Transactions on Control Systems Technology, 2007
Santosh Devasia, Evangelos Eleftheriou, S O Reza Moheimani   +2 more
exaly  

Nanopositioning Technologies

2016
openaire   +1 more source

Parameters Optimization and Experiment of A Planar Parallel 3-DOF Nanopositioning System

IEEE Transactions on Industrial Electronics, 2018
Ruizhou Wang, Xianmin Zhang
exaly  

New control in nanopositioning

Nano Today, 2006
openaire   +1 more source