Results 171 to 180 of about 4,098 (213)

A MEMS Stage for 3-Axis Nanopositioning

2007 IEEE International Conference on Automation Science and Engineering, 2007
Applications in micro and nanotechnologies require millimeter-sized devices that are capable of 3-axis positioning with motion ranges of micrometers and resolutions of nanometers. This paper reports on the design, fabrication, and testing of a MEMS-based 3-axis positioning stage.
Xinyu Liu, Keekyoung Kim, Yu Sun
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Nanotube multi-functional nanoposition sensors

Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems, 2005
Prototypes of indvidual carbon-nanotube-based nanoposition sensors for detercting approaching, touching, and sliding positions are presented on the bases of the interelectrodedistance-based field emission current change of a nanotube emitterand the resistance change caused by sliding motion of nanotube on an Au substrate.
P Liu, L Dong, F Arai, T Fukuda
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Position Sensors for Nanopositioning

2016
Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution, and speed of the machine, the sensor performance is a foremost consideration.
Andrew J. Fleming, Kam K. Leang
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Embedded Capacitive Displacement Sensor for Nanopositioning Applications

IEEE Transactions on Instrumentation and Measurement, 2010
The scale of nano objects requires very precise position determination. The state-of-the-art manipulators involve accurate nanometer positioning. This paper presents the design of a capacitive displacement sensor for a nanopositioning application. The challenges of designing a capacitor sensitive to nanometer movements that fits in the area of a few ...
Svetlana Avramov-Zamurovic, Nicholas G. Dagalakis, Rae Duk Lee, null Yong Sik Kim, null Jae Myung Yoo, null Seung Ho Yang   +5 more
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Tracking Control for Nanopositioning Systems

2016
The performance of nanopositioning systems is greatly affected by their mechanical dynamics, and for piezo-actuated designs, induced structural vibration, hysteresis, and creep can drastically limit positioning precision. Therefore, tracking control, both feedback and feedforward control, plays an important role in achieving high-performance operation,
Kam K. Leang, Andrew J. Fleming
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2DOF Control Design for Nanopositioning

2011
This chapter will focus on control systems theoretic analysis and synthesis that significantly expand the range of performance specifications and positioning capabilities of scanning probe microscopes (SPMs).We will present a systems theory framework to study fundamental limitations on the performance of one and two degree-of-freedom (DOF) control ...
Chibum Lee, Gayathri Mohan, Srinivasa Salapaka   +2 more
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A Six-DOF Micro-/Nanopositioning System

2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2018
Motivated by the requirement of developing a high resolution, high precision and low parasitic motion positioning stage for spatial micro-/nanomanipulation, a six- DOF parallel flexure mechanism was analyzed in this paper. Tens of micrometers travel range and tens of nanometers resolution can be achieved. The stage has three flexible parallel limbs. To
Defu Zhang, Huanan Chen, Pengzhi Li, Mingyang Ni, Kang Guo, Dongping Wang, Zhihui Wu, Jianguo Zhang, Pengzhi Li   +8 more
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Improving piezo actuators for nanopositioning tasks

Laser-based Micro- and Nanoprocessing XII, 2018
In recent years, numerous applications emerged on the market with seemingly contradicting demands. On one side, the structure size decreased while on the other side, the overall sample size and speed of operation increased. Although the principle usage of piezoelectric positioning solutions has become a standard in the field of micro- and ...
Vassil Gramov, Bernt Götz, Martin Seeliger   +2 more
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MEMS for Nanopositioning: Design and Applications

Journal of Microelectromechanical Systems, 2017
Nanopositioners are high-precision mechatronic devices that are capable of generating mechanical motion with nanometer or sub-nanometer resolution. With this motion typically being available over mechanical bandwidths of several kilohertz or greater, nanopositioners have become important tools for many areas of nanotechnology.
Mohammad Maroufi, Anthony G. Fowler, S. O. Reza Moheimani   +2 more
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Control of the nanopositioning devices

42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475), 2004
We present a paradigm which prescribes a procedure for a systematic design, analysis and development of nanopositioning devices. In this effort, we have used many tools from modern control theory to model devices, to quantify device resolution, bandwidth, range, and robustness, and to tackle undesirable nonlinear effects such as hysteresis and creep ...
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