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High-speed spiral nanopositioning

IFAC Proceedings Volumes, 2011
Abstract Nanometer-precise positioning at ultra-high velocities is a major challenge for rapidly emerging applications that use scanning probes in order to observe and alter the properties of materials down to the nanoscale. Typical examples include surface imaging, nanolithography and data storage.
Andreas Kotsopoulos   +3 more
openaire   +1 more source

Nanopositioning for probe storage

Proceedings of the 2005, American Control Conference, 2005., 2005
Scanning-probe data-storage devices are currently being explored as alternatives to conventional data storage. Ultra-high density, small form factor, and low cost are thought to be the primary advantages of probe storage. The ultra-high a real density makes nanopositioning a significant challenge in probe storage.
A. Sebastian   +5 more
openaire   +1 more source

NanoPositioning – extreme calibration

Assembly Automation, 1996
NanoPositioning is a combination of piezoelectric ceramics, capacitance sensors and flexure hinges, and is the art of positioning in space with resolutions of one nanometre and less. Describes the technologies involved and how they are applied to the growing demand for precision mechanisms.
openaire   +1 more source

Maglev Linear Actuator for Nanopositioning

Microelectromechanical Systems, 2002
Manufacture of nanoscale structures and atomic-level manipulation is an emerging technology field in the 21st century [1,2]. This paper presents a novel magnetically levitated instrument capable of six-degrees-of-freedom (6-DOF) motion with a single moving part.
Won-jong Kim   +2 more
openaire   +1 more source

Nanopositioning performance of MIMO MPC

2015 10th Asian Control Conference (ASCC), 2015
Model predictive control (MPC) refers to a class of computer control algorithms which is commonly used when tracking a reference trajectory is the primary goal. It minimizes the steady-state tracking error, increases the closed-loop bandwidth, and enables the controller to track a reference signal, the major requirements for nanopositioning ...
M. S. Rana, H. R. Pota, I. R. Petersen
openaire   +1 more source

Six-DOF Mechatronic Nanopositioning Device

IFAC Proceedings Volumes, 2002
Abstract The ability to manufacture nanoscale devices in precisely controlled manner will be essential for the next-generation nanotechnology. This paper presents the mechanical design and instrumentation structure of a novel six-degree-of-freedom magnetically levitated stage for nanopositioning.
Won-Jong Kim   +2 more
openaire   +1 more source

Noise in Nanopositioning Systems

2014
Mechanical and electrical noise in nanopositioning systems is unavoidable and dictates the maximum positioning resolution. The major sources of noise include sensor noise, amplifier noise, and external disturbances. In this chapter, these noise sources are discussed and their influence on positioning resolution is evaluated.
Andrew J. Fleming, Kam K. Leang
openaire   +1 more source

Optical spectral encoding for nanopositioning

2018 International Conference Laser Optics (ICLO), 2018
Methodology based on spectral encoding of broadband emission has been developed to control the position of a stage and its movement with nanometer precision. A distinctive feature of the methodology is that it allows to control the absolute position of the stage without pre-calibration.
I. G. Likhachev   +2 more
openaire   +1 more source

Advances in piezo-nanopositioning technology

Proceedings 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2003), 2004
This paper reports on recent advancements in piezo-driven nanopositioning technology, parallel metrology, parallel kinematics, active trajectory control, and covers new control algorithms for vibration suppression and tracking error elimination and their benefits for the user.
K. Spanner, S. Vorndran
openaire   +1 more source

Friction compensation for Nanopositioning and Nanomeasuring Machines

2010 11th IEEE International Workshop on Advanced Motion Control (AMC), 2010
The presented work concerns the modeling and experimental verification of the highly nonlinear behavior in positioning on the nanometer scale. The main goal of this work is to identify and extend a simple dynamic friction model, which allows a model-based estimation of the friction force including the system inertia only based on a displacement input ...
Amthor, A.   +2 more
openaire   +2 more sources

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