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Nanopositioning for Lithography and Data Storage
2016The history of the science shows that there is usually one strong social demand behind a new technology. The new technology, which can solve the key problem, must be got people’s praise and attraction. Nanotechnology is also facing the similar historical opportunity.
Wenbo Zhang, Ming Pang, Changhai Ru
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Tracking Control for Nanopositioning Systems
2016The performance of nanopositioning systems is greatly affected by their mechanical dynamics, and for piezo-actuated designs, induced structural vibration, hysteresis, and creep can drastically limit positioning precision. Therefore, tracking control, both feedback and feedforward control, plays an important role in achieving high-performance operation,
Kam K. Leang, Andrew J. Fleming
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A Hybrid Control Approach to Nanopositioning
2013Precise position control on the nanometer and subnanometer scale, referred to as nanopositioning, is a key enabler for nanoscale science and engineering. In nanopositioning, feedback control is essential to meet the stringent requirements on accuracy, stability, and repeatability in the presence of model uncertainties and environmental disturbances. In
Tomas Tuma +3 more
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2DOF Control Design for Nanopositioning
2011This chapter will focus on control systems theoretic analysis and synthesis that significantly expand the range of performance specifications and positioning capabilities of scanning probe microscopes (SPMs).We will present a systems theory framework to study fundamental limitations on the performance of one and two degree-of-freedom (DOF) control ...
Chibum Lee +2 more
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A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics
Mechanical Systems and Signal Processing, 2018Wu-Le Zhu, Zhiwei Zhu, Ping Guo
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Nanopositioning Systems with Piezoelectric Actuators, Current State and Future Perspective
Science of Advanced Materials, 2017Morteza Mohammadzaheri +1 more
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Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey
IEEE Transactions on Automation Science and Engineering, 2016Guoying Gu, Limin Zhu, Chun-Yi Su
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