Results 131 to 140 of about 762 (173)
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A robust adaptive servocompensator for nanopositioning control
49th IEEE Conference on Decision and Control (CDC), 2010Scanning probe microscopes, used in a diverse range of fields, are commonly actuated by piezoelectric nanopositioners. Because of coupling between hysteresis and fast dynamics, precise control of piezo-actuated systems is a difficult task. To solve this problem, we propose the use of an adaptive servocompensator.
Alex Esbrook +2 more
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Noise in Nanopositioning Systems
2014Mechanical and electrical noise in nanopositioning systems is unavoidable and dictates the maximum positioning resolution. The major sources of noise include sensor noise, amplifier noise, and external disturbances. In this chapter, these noise sources are discussed and their influence on positioning resolution is evaluated.
Andrew J. Fleming, Kam K. Leang
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Dual actuation for high-bandwidth nanopositioning
2008 47th IEEE Conference on Decision and Control, 2008The imaging speed of atomic force microscopes (AFM) is limited by the bandwidth of the feedback loop to measure the sample topography. In contact mode as well as tapping mode operation, this feedback loop is crucial to control and minimize the force between the probing tip and the sample, which is done by controlling the vertical tip sample distance ...
Georg Schitter +2 more
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Gaussian Beams and Spatial Modulation in Nanopositioning
IEEE Transactions on Instrumentation and Measurement, 2009The kilogram is the last base unit of the systeme international d'unites (SI) that is still defined by an artifact. The watt-balance experiment is one of the promising methods that can produce a new definition of the kilogram based on fundamental constants.
David Haddad +3 more
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Maglev Linear Actuator for Nanopositioning
Microelectromechanical Systems, 2002Manufacture of nanoscale structures and atomic-level manipulation is an emerging technology field in the 21st century [1,2]. This paper presents a novel magnetically levitated instrument capable of six-degrees-of-freedom (6-DOF) motion with a single moving part.
Won-jong Kim +2 more
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MEMS for Nanopositioning: Design and Applications
Journal of Microelectromechanical Systems, 2017Nanopositioners are high-precision mechatronic devices that are capable of generating mechanical motion with nanometer or sub-nanometer resolution. With this motion typically being available over mechanical bandwidths of several kilohertz or greater, nanopositioners have become important tools for many areas of nanotechnology.
Mohammad Maroufi +2 more
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Position Sensors for Nanopositioning
2016Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution, and speed of the machine, the sensor performance is a foremost consideration.
Andrew J. Fleming, Kam K. Leang
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Embedded Capacitive Displacement Sensor for Nanopositioning Applications
IEEE Transactions on Instrumentation and Measurement, 2010The scale of nano objects requires very precise position determination. The state-of-the-art manipulators involve accurate nanometer positioning. This paper presents the design of a capacitive displacement sensor for a nanopositioning application. The challenges of designing a capacitor sensitive to nanometer movements that fits in the area of a few ...
Svetlana Avramov-Zamurovic +5 more
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High speed nanopositioning with force feedback
Proceedings of the 2010 American Control Conference, 2010In this work a new method for feedback control of nanopositioning systems is proposed. A measurement of the force applied to the moving platform by the actuator is utilized as a feedback variable for both tracking and damping control. Excellent tracking and damping performance can be achieved with a simple integral controller.
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Advances in piezo-nanopositioning technology
Proceedings 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2003), 2004This paper reports on recent advancements in piezo-driven nanopositioning technology, parallel metrology, parallel kinematics, active trajectory control, and covers new control algorithms for vibration suppression and tracking error elimination and their benefits for the user.
K. Spanner, S. Vorndran
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