Results 121 to 130 of about 541 (160)
Some of the next articles are maybe not open access.
A novel long-travel piezoelectric-driven linear nanopositioning stage
Precision Engineering, 2006Abstract This study presents a novel long-travel piezoelectric-driven linear nanopositioning stage capable of operating in either a stepping mode or in a scanning mode. In the stepping mode, the stick–slip friction effect between a linear micropositioner and a sliding stage is used to drive the stage step-by-step through an extended displacement ...
Chih-Liang Chu, Sheng-Hao Fan
openaire +1 more source
Closed-Loop Range-Based Control of Dual-Stage Nanopositioning Systems
IEEE/ASME Transactions on Mechatronics, 2021In this article, a closed-loop control framework for dual-stage nanopositioning systems is presented that allows the user to allocate control efforts to the individual actuators based on their range capabilities. Recent work by the authors has focused on range-based control of dual-stage actuators implemented as a prefilter, which assumes that each ...
Aleksandra Mitrovic +3 more
openaire +1 more source
Five-axis bimorph monolithic nanopositioning stage: Design, modeling, and characterization
Sensors and Actuators A: Physical, 2021Abstract The article describes the design and modeling of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. Six-axis motion is also possible but requires 16 amplifier channels rather than 8. The nanopositioner is ultra low profile with a thickness of 1 mm.
Meysam Omidbeike +3 more
openaire +1 more source
High-bandwidth control design for a piezoelectric nanopositioning stage
2011 9th IEEE International Conference on Control and Automation (ICCA), 2011To achieve fast and accurate tracking of a wideband reference trajectory, the piezoelectric (PZT) actuator requires a high-bandwidth control system, which is however restricted by the resonant mode of the PZT positioning stage. In this paper, we study two resonant compensation techniques to damp the resonant mode for increased servo bandwidth.
Zheng, Jinchuan, Fu, Minyue
openaire +1 more source
A novel flexure-based vertical nanopositioning stage with large travel range
Review of Scientific Instruments, 2015This paper presents the design of a novel flexure–based vertical (or Z–axis) nanopositioning stage driven by a piezoelectric actuator (PZT), which is capable of executing large travel range. The proposed stage consists mainly of a hybrid displacement amplification mechanism (DAM), a motion guiding mechanism, and a decoupling mechanism.
Xiaobo, Zhu +4 more
openaire +2 more sources
Robust Adaptive Control of Coupled Parallel Piezo-Flexural Nanopositioning Stages
IEEE/ASME Transactions on Mechatronics, 2009Precision control of multiple-axis piezo-flexural stages used in a variety of scanning probe microscopy systems suffers not only from hysteresis nonlinearity, but also from parametric uncertainties and the cross-coupled motions of their axes. Motivated by these shortfalls, a Lyapunov-based control strategy is proposed in this article for simultaneous ...
Saeid Bashash, Nader Jalili
openaire +1 more source
Thermal error modeling and compensation of long-travel nanopositioning stage
The International Journal of Advanced Manufacturing Technology, 2012Thermally induced error of nanopositioning systems is rarely studied specifically because most researchers strictly limit the ambient temperature in order to ignore the influences of thermal deformation. However, the control cost of a narrow temperature range is too high for widely application.
Jingshu Wang +3 more
openaire +1 more source
Nanoposition sensing and control in HDD dual-stage servo systems
Proceedings of the 2004 IEEE International Conference on Control Applications, 2004., 2005Position sensors other than the read/write head are not embedded into current HDDs as they either do not possess nanometer sensing resolution or are too costly. Moreover, the "optimal" location for placing the sensors is still unknown. This paper studies the nanoposition sensing issues in HDD dual-stage servo systems. Using SSA (self-sensing actuation),
C.K. Pang +3 more
openaire +1 more source
Design and analysis of a high-speed XYZ nanopositioning stage
2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2015This paper presents the design and analysis of a high-speed XYZ nanopositioning stage. The developed stage is composed of a parallel-kinematic XY stage and a Z stage which is nested within the end-effector of the XY stage. To achieve high resonance frequencies, four special flexure modules with large stiffness are employed for the XY stage.
Chun-Xia Li +4 more
openaire +1 more source
Development of High Bandwidth Flexure Based Stage for Nanopositioning Applications
Advanced Science Letters, 2018Micro and Nanopositioning systems are widely used in semiconductor, optics, materials science, photonics packaging, optical focusing objectives etc. This paper is focused on development of high bandwidth flexure based stage for nanopositioning requirements.
T. Narendra Reddy +4 more
openaire +1 more source