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Phase leading active disturbance rejection control for a nanopositioning stage
ISA Transactions, 2021Hysteresis severely reduces positioning accuracy of a piezoelectric nanopositioning system. Inverse hysteresis model-based control is difficult to maintain satisfied performance in presence of uncertainties and disturbances. Linear active disturbance rejection control (LADRC) is a practical approach.
Wei, Wei, Zhiyuan, Zhang, Min, Zuo
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Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey
IEEE Transactions on Automation Science and Engineering, 2016Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion.
Guo-Ying Gu +4 more
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Range-based control of dual-stage nanopositioning systems
Review of Scientific Instruments, 2014A novel dual-stage nanopositioner control framework is presented that considers range constraints. Dual-stage nanopositioners are becoming increasingly popular in applications such as scanning probe microscopy due to their unique ability to achieve long-range and high-speed operation.
Garrett M, Clayton +2 more
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Modeling of a Piezoelectric Based Nanopositioning Stage
2020Piezoelectric-based nanopositioning stages are widely used in ultraprecision positioning due to their high resolution capability. The present work presents an overall model for such a nanopositioning stage, considering phenomena such as hysteresis and creep.
Fernando Villegas +3 more
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High-bandwidth control design for a piezoelectric nanopositioning stage
2011 9th IEEE International Conference on Control and Automation (ICCA), 2011To achieve fast and accurate tracking of a wideband reference trajectory, the piezoelectric (PZT) actuator requires a high-bandwidth control system, which is however restricted by the resonant mode of the PZT positioning stage. In this paper, we study two resonant compensation techniques to damp the resonant mode for increased servo bandwidth.
Jinchuan Zheng, Minyue Fu 0001
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A compact nanopositioning stage with high vibrational eigenfrequencies
Review of Scientific Instruments, 2005A compact nanopositioning stage is described that has high vibrational eigenfrequencies and is, therefore, insensitive to external vibrations. The high eigenfrequencies are produced by a rigid structure that is designed so that it does not degrade the motional performance of the stage. Preliminary performance evaluations are presented.
S. J. Ball, C. Folsom, A. B. McLean
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Enhancement of Tracking Performance for Piezo-Nanopositioning Stage
2007 International Conference on Mechatronics and Automation, 2007Nano-positioning systems using piezoelectric stack actuator have a very wide range of applications including ultra-precision machine tools, diamond turning machines and motion stage. However, loss of tracking positioning precision in piezoelectric actuator occurs due to hysteresis during long range applications and creep effects when positioning is ...
Changhai Ru +3 more
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Nanoposition sensing and control in HDD dual-stage servo systems
Proceedings of the 2004 IEEE International Conference on Control Applications, 2004., 2005Position sensors other than the read/write head are not embedded into current HDDs as they either do not possess nanometer sensing resolution or are too costly. Moreover, the "optimal" location for placing the sensors is still unknown. This paper studies the nanoposition sensing issues in HDD dual-stage servo systems. Using SSA (self-sensing actuation),
Chee Khiang Pang +3 more
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Design and modeling of a novel 3-PSS flexure nanopositioning stage
2017 IEEE International Conference on Advanced Intelligent Mechatronics (AIM), 2017This paper presents the mechanical design of a novel 3-PSS (P and S represent the prismatic and spherical joints, respectively) parallel-kinematic flexure nanopositioning stage. This stage provides a high-precision motion driven by three piezoelectric actuators.
Xiaozhi Zhang, Qingsong Xu 0002
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A novel direct drive electromagnetic XY nanopositioning stage
CIRP Annals, 2021Abstract To overcome the inherent limitation of existing nanopositioning stages running in hundreds of micrometres, a novel normal-stressed electromagnetic actuator is developed to construct a direct drive XY nanopositioning stage, which features a contactless dual-axial actuation with a relatively high force density, a loosely-constrained stroke ...
Zhiwei Zhu, Li Chen, Suet To
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