Results 151 to 160 of about 779 (186)
Some of the next articles are maybe not open access.
Dual mode predictive control for ultrafast piezoelectric nanopositioning stages
2011 IEEE International Conference on Robotics and Automation, 2011Precision control of piezoelectric motor nanopositioning stages is widely used in a variety of nano-manufacturing equipments. But due to the hysteresis nonlinearity with input saturation, it is challenging to design an ultrafast output feedback controller with large region of closed-loop stability.
Hai-Tao Zhang +2 more
openaire +1 more source
Spatial-temporal trajectory redesign for dual-stage nanopositioning systems
2017 IEEE International Conference on Advanced Intelligent Mechatronics (AIM), 2017This paper focuses on trajectory redesign for dualstage nanopositioning systems where speed, range, and resolution are considered. This approach differs from many existing approaches that consider only speed. Dual-stage nanopositioning systems are becoming increasingly popular due to their unique ability to achieve long-range and high-speed operation ...
Dejun Guo +3 more
openaire +1 more source
Design and fabrication of a novel compliant rotary nanopositioning stage
2013 IEEE International Conference on Robotics and Automation, 2013This paper presents the design, fabrication, and testing of a compliant rotary nanopositioning stage for precision engineering applications. The major advantage of the rotary stage lies in that it possesses a large rotational range and a compact size simultaneously. A new idea of compound radial flexure is proposed to enable this merit.
openaire +1 more source
Design of a new 5-DOF flexure-based nanopositioning stage
10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2015In this paper, the design of a new compliant five-axis parallel nanopositioning stage driven by PZT actuators is presented, which is based on flexure mechanism. The flexure stage contains two kinds of displacement amplifiers based on simple lever principle and bridge principle, respectively.
Xiaozhi Zhang, Qingsong Xu 0002
openaire +1 more source
Robust Sliding-Mode Control for Dual-Stage Nanopositioning Systems
2019 American Control Conference (ACC), 2019In this article, a robust feedback control scheme is presented for dual-stage nanopositioning platforms. Dual-stage nanopositioners consist typically of a long-range, low-speed actuator connected in series with a low-range, highspeed actuator. A sliding mode control structure is designed to dedicate sliding actions to the short-range actuator ...
William S. Nagel, Kam K. Leang
openaire +1 more source
Development of a Parallel-Kinematic High-Speed XY Nanopositioning Stage
2013This paper presents a parallel-kinematic high-speed XY nano-positioning stage driven by piezoelectric stack actuators. With the purpose to achieve high resonance frequencies and a relatively large travel range, four special flexure modules are used to provide large stiffness.
Chun-Xia Li +3 more
openaire +2 more sources
Design of a new flexure-based XYZ parallel nanopositioning stage
2015 IEEE International Conference on Robotics and Biomimetics (ROBIO), 2015This paper concentrates on the mechanism design of a new compact parallel flexure stage with three DOFs. First of all, a bridge-principle amplifier is proposed by a serial connection of two fundamental bridge amplifiers. Then, an analytical study of amplifiers in terms of two-stage amplifiers is conducted by performing finite-element analysis (FEA ...
Xiaozhi Zhang, Qingsong Xu 0002
openaire +1 more source
Design and Control of a Multi-Actuated Nanopositioning Stage with Stacked Structure
2019 American Control Conference (ACC), 2019A novel multi-actuated nanopositioning stage with stacked structure has been developed. The aim is to achieve both high bandwidth and large motion range. Symmetric flexures are designed to obtain equal stiffness along any direction in the lateral plane.
Chen Yang 0014 +4 more
openaire +1 more source
A Long-Stroke Nanopositioning Control System of the Coplanar Stage
IEEE/ASME Transactions on Mechatronics, 2014With the continuing trend toward device miniaturization in many engineering and scientific fields, the need to accomplish highly precise measurements at the micro- or nanoscale has emerged as a critical concern. This paper presents a high-precision motion control system for the nanopositioning of a coplanar X-Y stage driven by two commercial ultrasonic
Hung-Yu Wang +3 more
openaire +1 more source
Design and analysis of a high-speed XYZ nanopositioning stage
2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2015This paper presents the design and analysis of a high-speed XYZ nanopositioning stage. The developed stage is composed of a parallel-kinematic XY stage and a Z stage which is nested within the end-effector of the XY stage. To achieve high resonance frequencies, four special flexure modules with large stiffness are employed for the XY stage.
Chun-Xia Li +4 more
openaire +1 more source