Results 161 to 170 of about 779 (186)

Dual-Stage Repetitive Control for High-Speed Nanopositioning

IFAC Proceedings Volumes, 2010
Abstract This paper studies an enhanced dual-stage repetitive controller (RC) for improved robustness and tracking of periodic reference trajectories in piezo-based nanopositioning systems. The dual-stage RC system consists of a signal generator designed to provide high gain at the fundamental and all the harmonic frequencies of the reference ...
Yingfeng Shan, Kam K. Leang
openaire   +1 more source

Local probe microscopy with interferometric monitoring of the stage nanopositioning

Measurement Science and Technology, 2009
We present a system of positioning and interferometric monitoring of a sample position for measurements and calibration in the nanoscale in metrology. The positioning is based on a three-axis stage which allows replacing scanning by the probe of an atomic force microscope with a system with full interferometric displacement measurement.
J Lazar, P Klapetek, O Číp, M Čížek, M Šerý   +4 more
openaire   +1 more source

High-Speed Tracking of a Nanopositioning Stage Using Modified Repetitive Control

IEEE Transactions on Automation Science and Engineering, 2017
In this paper, a modified repetitive control (MRC) based approach is developed for high-speed tracking of nanopositioning stages. First, the hysteresis nonlinearity is decomposed as a periodic disturbance over a linear system. Then, the MRC technique is utilized to account for the periodic disturbances/errors caused by the hysteresis and dynamics ...
Chun-Xia Li, Guo-Ying Gu, Mei-Ju Yang, Li-Min Zhu 0001   +3 more
openaire   +1 more source

Design of a Three Degree of Freedom Nanopositioning Stage

2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2022
Jiancheng Nie, Yuguo Cui, Pan Chen
openaire   +1 more source

Modeling of Piezoelectric-Actuated Nanopositioning Stages Involving with the Hysteresis

2016
In this chapter, a general skeleton on modeling of piezoelectric-actuated nanopositioning stages (PANSs) involving with the hysteresis is presented. Toward this framework, a general model, including nonlinear electric behavior, voltage-charge hysteresis, piezoelectric effect, and frequency response of the stage, is developed to completely characterize ...
Guo-Ying Gu, Li-Min Zhu, Chun-Yi Su, Han Ding   +3 more
openaire   +1 more source

Design, prototyping, modeling and control of a MEMS nanopositioning stage

Proceedings of the 2011 American Control Conference, 2011
Y. Zhu, Ali Bazaei, S. O. Reza Moheimani, Mehmet R. Yuce   +3 more
openaire   +1 more source

UDE-based adaptive sliding mode control of a piezoelectric nanopositioning stage

2016 American Control Conference (ACC), 2016
This paper presents a new adaptive sliding mode control (ASMC) scheme with uncertainty and disturbance estimation (UDE) technique dedicated to precise motion tracking control of a piezoelectrically actuated nanopositioning stage. Unlike the conventional SMC scheme based on a discontinuous control, a smooth control action is devised based on UDE method ...
openaire   +1 more source

Enhanced robust nanopositioning control for an X-Y piezoelectric stage with sensor delays: An infinite dimensional H∞ optimization approach

Mechatronics, 2021
Peng Yan
exaly  

The stage is set for Nanopositioning

Nano Today, 2008
openaire   +1 more source

Design of a Long Stroke Nanopositioning Stage With Self-Damping Actuator and Flexure Guide

IEEE Transactions on Industrial Electronics, 2022
Chi Zhang, Xiaolu Huang, Miao Yang
exaly