Design and optimization of a long travel, two-axis flexural nanopositioning stage
This thesis details the design, computational optimization, and resultant evaluation of a two-axis flexural nanopositioning stage based on a modified version of a double parallelogram flexure which features underconstraint-eliminating features nested ...
Watts, Tyler Bennett
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, 2016 Nanopositioning stages are an example of motion systems that are required to accurately perform high frequency repetitive scanning motions. The tracking performance can be significantly increased by iteratively updating a feedforward input by using a ...
de Rozario, R. +6 more
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Development and implementation of a deflection amplification mechanism for capacitive accelerometers
, 2012 Micro-Electro-Mechanical-Systems (MEMS) and especially physical sensors are part of a flourishing market ranging from consumer electronics to space applications.
Zeimpekis, Ioannis
core
High precision structured H∞ control of a piezoelectric nanopositioning platform. [PDF]
PLoS One, 2023 Feng H, Zhou H, Jiang C, Pang A.
europepmc +1 more source
Performance analysis and characterisation of micro-nanopositioning systems.
, 2014 International audienceSeparation and quantification of error components in micro-nanopositioning systems are presented with theorectical analysis and experimental characterisation, which are illustrated with a single-axis nanopoisitioning stage.
Tan, Ning +2 more
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Design and Analysis of Ultra-Precision Smart Cutting Tool for In-Process Force Measurement and Tool Nanopositioning in Ultra-High-Precision Single-Point Diamond Turning. [PDF]
Micromachines (Basel), 2023 Hatefi S, Smith F.
europepmc +1 more source
Image-Guided Nanopositioning Scheme for SEM
, 2018 Positioning of micro-nanoobjects inside a scanning electron microscope (SEM) for manipulation is a key and challenging task to perform. Often it is performed by skilled operators via teleoperation, which is tedious and lacks repeatability. In this paper,
Dembélé, Sounkalo +3 more
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Design and fabrication of an eddy current damper for a flexure-based nanopositioning stage
This thesis details the design, fabrication, and testing of an eddy current damper for a flexure-based nanopositioning stage, which is implemented within a μ-SLS 3D printer.
Liao, Yifeng
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Compensation Method for the Nonlinear Characteristics with Starting Error of a Piezoelectric Actuator in Open-Loop Controls Based on the DSPI Model. [PDF]
Micromachines (Basel), 2023 An D +6 more
europepmc +1 more source
Tuning and Testing Dual Sensor Technology in Digital Implementation for Single-Axis Nanopositioning Stages [PDF]
, 2016 This study produces a practical tuning algorithm to tune the force feedback control for nanopositioning systems. The tuning procedure uses standard measures such as bandwidth and oscillation to tune the parameters of the force feedback loop and the outer
Heath, William, Kara-Mohamed, Mohamed
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