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Mathematical simulation of an inclined neutralization channel for a plasma source of neutral beams
Russian Microelectronics, 2009An earlier developed model for a neutralization channel of a plasma source of neutral beams is applied to the case of an inclined neutralization channel. The energy and angular characteristics of the output beam are presented together with the neutralization factor as a function of the length and inclination angle of the channel.
A. V. Degtyarev +2 more
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Energy Distribution of Neutrals from a Hyperthermal Neutral Beam (HNB) Source
Journal of the Korean Physical Society, 2008The energy distribution of the hyperthermal neutral beam (HNB) produced by impingement of plasma ions onto a metal surface was measured. A HNB source has been developed with a hotfilament discharge. The plasma was confined near the metal surface by using the magnetic field of a magnetron configuration.
Joung, M +6 more
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New ion source for KSTAR neutral beam injection system
Review of Scientific Instruments, 2012The neutral beam injection system (NBI-1) of the KSTAR tokamak can accommodate three ion sources; however, it is currently equipped with only one prototype ion source. In the 2010 and 2011 KSTAR campaigns, this ion source supplied deuterium neutral beam power of 0.7–1.6 MW to the KSTAR plasma with a beam energy of 70–100 keV.
Tae-Seong, Kim +2 more
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Numerical simulation for the accelerator of the KSTAR neutral beam ion source
Review of Scientific Instruments, 2010Recent experiments with a prototype long-pulse, high-current ion source being developed for the neutral beam injection system of the Korea Superconducting Tokamak Advanced Research have shown that the accelerator grid assembly needs a further upgrade to achieve the final goal of 120keV/65A for the deuterium ion beam. The accelerator upgrade concept was
Tae-Seong, Kim +2 more
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Optimization of neutral beam injection in the beam plasma neutron source
Nuclear Fusion, 1995The power efficiency of neutron production in the Beam Plasma Neutron Source (BPNS), proposed as a volumetric 14 MeV neutron source, is maximized at an energy of 110-120 keV for positive ion based (deuteron) neutral beams. Deuterons injected into a triton plasma and tritons into a deuteron plasma are shown to give equal results at the same injection ...
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Quasi-steady carbon plasma source for neutral beam injector
Review of Scientific Instruments, 2013Carbon plasma is successfully sustained during 1000 s without any carrier gas in the bucket type ionization chamber with cusp magnetic field. Every several seconds, seed plasmas having ∼3 ms duration time are injected into the ionization chamber by a shunting arch plasma gun.
H, Koguchi +5 more
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Development of Neutral Beam Source Using Electron Beam Excited Plasma
Japanese Journal of Applied Physics, 2011A low-energy neutral beam (NB) source, which consists of an electron-beam-excited plasma (EBEP) source and two carbon electrodes, has been developed for damageless etching of ultra-large-scale integrated (ULSI) devices. It has been confirmed that the Ar ion beam energy was controlled by the acceleration voltage and the beam profile had good ...
Yasuhiro Hara +3 more
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Long pulse beam extraction with a prototype ion source for the KSTAR neutral beam system
Review of Scientific Instruments, 2008Long pulse operational characteristics of the high current ion source for the KSTAR neutral beam system are described. The beam pulse length of 300s was successfully operated at a beam power of 1.6MW with a beam energy of 70keV. Beam energy, beam current, beam divergence, arc power, and several other operational parameters were measured during a pulse ...
Byung-Hoon, Oh +13 more
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Hyperthermal neutral beam sources for material processing.
The Review of scientific instruments, 2008Hyperthermal neutral beams have a great potential for material processes, especially for etching and thin film deposition for semiconductor and display fabrication as well as deposition for various thin film applications. Plasma-induced damage during plasma etching is a serious problem for manufacturing deep submicron semiconductor devices and is ...
S J, Yoo +13 more
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Beam source for moderately fast neutral alkali atoms
Review of Scientific Instruments, 1981In certain applications the linear arrangement of ion source and charge exchange chamber in standard charge exchange sources for neutral atomic beams leads to undesirable stray light. To avoid this problem a new design has been developed and tested. The maximum beam flux emerging from this source is 2.0 ⋅ 1010 atoms/s ⋅ mm2 at the energy E = 100 eV ...
S. Kita +3 more
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