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Method of making a split gate non-volatile memory (NVM) cell and a logic transistor
2016LOIKO KONSTANTIN V, WINSTEAD BRIAN A
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Non-volatile memory (NVM) cell and high-K and metal gate transistor integration
2015BAKER JR FRANK K, HONG CHEONG MIN
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Non-volatile memory (NVM) and high-k and metal gate integration using gate-first methodology
2015PERERA ASANGA H +3 more
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