Results 321 to 323 of about 6,320,743 (323)

Lithography performance of contact holes: I. Optimization of pattern fidelity using MPG and MPG-II

Photomask Japan, 2000
S. Weaver, Maiying Lu, J. Chabala, D. Ton, Charles A. Sauer, C. Mack   +5 more
semanticscholar   +1 more source

Pattern fidelity in nanoimprinted films using critical dimension small angle x-ray scattering

, 2006
Ronald Jones, C. Soles, E. Lin, W. Hu, R. Reano, S. Pang, S. Weigand, D. Keane, J. Quintana   +8 more
semanticscholar   +1 more source

Geometry-Based Curvilinear Mask Process Correction for Enhanced Pattern Fidelity, Contrast, and Manufacturability

IEEE Transactions on Semiconductor Manufacturing
exaly