Results 301 to 307 of about 4,497,800 (307)

METHOD FOR REPAIRING PHASE SHIFT MASKS

2009
ZIBOLD AXEL, KUSCHNERUS PETER, KIENZLE OLIVER   +2 more
openaire   +2 more sources

Method for eliminating phase conflict centers in alternating phase masks, and method for producing alternating phase masks

2005
LUDWIG BURKHARD, MOUKARA MOLELA
openaire   +1 more source

Measuring phase errors on phase shift masks

2008
ADEL MICHAEL, GHINOVKER MARK, MACK CHRIS A   +2 more
openaire   +1 more source

Phase-shift mask with assist phase regions

2012
HSIEH ROBERT L, FLACK WARREN W
openaire   +1 more source

TRANSMISSION AND PHASE BALANCE FOR PHASE-SHIFTING MASK

2002
QIAN QI-DE, WILMAN TSAI
openaire   +1 more source

Attenuated phase shift mask and a method for making the mask

2001
openaire   +1 more source

POROUS ACOUSTIC PHASE MASK

2019
MONDAIN-MONVAL OLIVIER, BRUNET THOMAS, PONCELET OLIVIER, JIN YABIN, KUMAR RAJ, MARRE SAMUEL, KOVALENKO ARTEM   +6 more
openaire   +1 more source