Results 291 to 300 of about 4,497,800 (307)

Method for fabricating phase shifting mask and a phase shifting mask

1998
openaire   +1 more source

Phase conflict resolution for photolithographic masks

2003
PIERRAT CHRISTOPHE, COTE MICHEL LUC
openaire   +4 more sources

Phase shift mask

2009
openaire   +2 more sources

INTERFEROMETER WITH PIXELATED PHASE SHIFT MASK

2020
openaire   +2 more sources

Phase shift mask blank, phase shift mask, and pattern transfer method

2008
YOSHIKAWA HIROKI, INAZUKI YUKIO, OKAZAKI SATOSHI, HARAGUCHI TAKASHI, FUKUSHIMA YUICHI, SAGA TADASHI, IL YOSHIHIRO   +6 more
openaire   +1 more source

Adaptive Phase-Mask Coronagraph

2013
Pierre, Haguenauer, Pierre, Bourget, Dimitri, Mawet, Schuhler, Nicolas   +3 more
openaire   +1 more source

In-situ balancing for phase-shifting mask

2003
DAO GIANG, QIAN QI-DE
openaire   +3 more sources

ALTERNATING PHASE SHIFT MASKING FOR MULTIPLE LEVELS OF MASKING RESOLUTION

2002
openaire   +2 more sources

PHASE MASK DESIGN AND PHASE MASK FOR WRITING OPTICAL FIBRE BRAGG GRATINGS

2003
SHENG YUNLONG, ROTHENBERG JOSHUA E, LI HONGPU, WANG YING, ZWEIBACK JASON   +4 more
openaire   +1 more source

MULTILAYER ATTENUATING PHASE-SHIFT MASKS

2000
openaire   +3 more sources