Results 281 to 290 of about 4,497,800 (307)

PHASE SHIFT MASK BLANK, MANUFACTURING METHOD THEREOF, AND PHASE SHIFT MASK

2020
openaire   +3 more sources

Use of Attenuated Phase Masks in Extreme Ultraviolet Lithography

Journal of Vacuum Science & Technology B, 1997
J E Björkholm, D M Tennant, D L White
exaly  

Phase shifting mask

1994
OHTSUKA HIROSHI, ABE KAZUTOSHI, TAGUCHI TAKASHI   +2 more
openaire   +1 more source

Binary and Phase Shifting Mask Design for Optical Lithography

IEEE Transactions on Semiconductor Manufacturing, 1992
exaly  

Mask Estimation Incorporating Phase-Sensitive Information for Speech Enhancement

Applied Acoustics, 2019
Bao Changchun, Xianyun Wang
exaly  

Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask

2005
NOZAWA OSAMU, MITSUI HIDEAKI, DIEU LAURENT   +2 more
openaire   +1 more source

Method for calibrating a phase mask and microscope

2020
EICHELKRAUT TONI, SIEBENMORGEN JÖRG
openaire   +3 more sources

METHOD OF MANUFACTURING PHASE SHIFT MASK AND PHASE SHIFT MASK

2009
openaire   +1 more source

Alternating phase mask

2004
HEISSMEIER MICHAEL, HOFSAESS MARKUS, LUDWIG BURKHARD, MOUKARA MOLELA, NOELSCHER CHRISTOPH   +4 more
openaire   +1 more source

Phase change memory mask

2014
openaire   +3 more sources