Results 121 to 130 of about 31,465 (305)
Reflection Spectra Modification of Diazoquinone-Novolak Photoresist Implanted with B and P Ions
, 2019 We investigate FP9120 positive photoresist films 1.8 μm thick that are spin-coated on the surface of KDB-10 (111) silicon wafers and implanted with В+ and Р+ ions by measuring the reflection’s spectra. It is shown that implantation reduces the refractive
Brinkevich, S. D. +5 more
core +1 more source
Micromachined Double‐Membrane Mechanically Tunable Metamaterial for Thermal Infrared Filtering
Advanced Photonics Research, Volume 6, Issue 5, May 2025.Herein, a mechanically tunable double‐layer plasmonic metamaterial leveraging the extraordinary optical transmission effect observed in subwavelength arrays of openings within thin metal layers is presented. The concept is experimentally validated by integrating the proposed metamaterial structure into an electrostatic parallel‐plate actuator to create
Oleg Bannik +7 more
wiley +1 more source
, 1996 Combined thermal and mechanical analysis of spun-on photoresist, and silylated photoresist films after each lithographic step was done using Differential Scanning Calorimetry (DSC) and Thermomechanical Analysis (TMA). For reacting photoresist systems the
Beltsios, K. +4 more
core
Infrared baking of positive photoresist for hybrid microcircuit fabrication
, 1976 The use of infrared heating to bake Shipley AZ1350 positive photoresist before exposure was investigated as an integral part of a cost-effective hybrid microcircuit photolithographic procedure.
Schantz, L. E.
core +1 more source
Advanced Photonics Research, Volume 6, Issue 5, May 2025.Microfabrication using nano‐ to micron‐sized blocks has transformative potential for next‐gen electronics, optoelectronics, and materials. Traditional methods are limited by scalability and precision. STIC, a single‐laser system for precise colloid manipulation and immobilization using femtosecond lasers, is introduced that enables efficient 3D ...
Krishangi Krishna +4 more
wiley +1 more source
Autonomous Navigation of Pollen‐Inspired Magnetic Microrobots for Biomedical Applications
Advanced Robotics Research, EarlyView.A sunflower pollen‐inspired magnetic microrobot enables controlled rolling navigation in vessel‐like environments. Its open geometry reduces hydrodynamic drag, while vision‐based closed‐loop control, shortest‐path planning, and reinforcement learning support target‐reaching and maze navigation with microrobot‐scale accuracy, highlighting a route toward
Ali Anil Demircali +6 more
wiley +1 more source
Meniscus coating and thickness measurement of photoresist
, 2014 In order to realize uniform coating of photoresist on large area substrates, a small meniscus coating applicator is designed and assembled, and it is used to coat a substrate of 200 mm200 mm.
Lin, J. +6 more
core +1 more source
Force–Displacement Characterization of PNIPAM Microactuators
Advanced Robotics Research, EarlyView.A method to experimentally establish a force–displacement diagram of poly(N‐isopropyl acrylamide) (PNIPAM) microactuators, printed by 2PP, is presented herein. PNIPAM is a hydrogel whose volume and stiffness change with temperature due to the absorption or release of water.
Manon Cassignol +4 more
wiley +1 more source
PAG Concentration Dependence of the Vertical Density Profile in Photoresist
, 2010 Vertical electron density profiles of photoresist film were obtained using X-ray reflectivity analysis. Small amount of density fluctuation at each depth of film could be analyzed with DWBA (distorted wave Born approximation) fitting technique.
Il Ahn, S +11 more
core +1 more source
Magnetically Actuated Microrobot for Drug Delivery: Current Progress and Challenges
Advanced Robotics Research, EarlyView.Magnetically actuated microrobots are reshaping targeted drug delivery through wireless propulsion, programmable materials, and localized therapeutic release. This review examines how fabrication, body material selection, structural architecture, loading mechanisms, and imaging‐guided control converge to enable microrobotic therapies while identifying ...
Yang Yang, David J. Cappelleri
wiley +1 more source