Results 11 to 20 of about 17,195 (246)
Nanomaterials, 2019 Patterning of lines of holes on a layer of positive photoresist SX AR-P 3500/6 (Allresist GmbH, Strausberg, Germany) spin-coated on a quartz substrate is carried out by using scanning near-field optical lithography.
Agata Roszkiewicz +3 more
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AIP Advances, 2015 A thickness distribution model of photoresist spin-coating on concave spherical substrate (CSS) has been developed via both theoretical studies and experimental verification.
S. Yang +8 more
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Fabrication of Low Loss Lithium Niobate Rib Waveguides Through Photoresist Reflow
IEEE Photonics Journal, 2022 We present lithography and argon plasma etching of lithium niobate on insulator (LNOI) rib waveguides using reflowed photoresist etch masks and 405 nm photolithography.
Karan Prabhakar, Ronald M. Reano
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Applied Sciences, 2018 In order to use touch control products more conveniently, a general objective is to develop lighter and smaller touch panels. A touch panel using the one glass solution (OGS) is an important development.
Meng-Hua Li, Shen-Tsu Wang
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Nanomaterials, 2021 We report a laser-pyrolyzed carbon (LPC) electrode prepared from a black photoresist for an on-chip microsupercapacitor (MSC). An interdigitated LPC electrode was fabricated by direct laser writing using a high-power carbon dioxide (CO2) laser to ...
Soongeun Kwon +8 more
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Rapid Prototyping of Organ-on-a-Chip Devices Using Maskless Photolithography
Micromachines, 2021 Organ-on-a-chip (OoC) and microfluidic devices are conventionally produced using microfabrication procedures that require cleanrooms, silicon wafers, and photomasks. The prototyping stage often requires multiple iterations of design steps.
Dhanesh G. Kasi +9 more
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Proceedings, 2018 This work introduces a novel method to characterize cross-linking differences in spincast polymers for waveguide applications. The method is based on a low-coherence interferometer which utilizes an imaging spectrometer to gather spatially resolved data ...
Christopher Taudt +4 more
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Micromachines, 2014 We applied two-photon polymerization to fabricate 3D synthetic niches arranged in complex patterns to study the effect of mechano-topological parameters on morphology, renewal and differentiation of rat mesenchymal stromal cells.
Manuela T. Raimondi +6 more
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Development of a virtual metrology method using plasma harmonics analysis
AIP Advances, 2017 A virtual metrology technique based on plasma harmonics is developed for predicting semiconductor processes. From a plasma process performed by 300 mm photoresist stripper equipment, a strong correlation is found between optical plasma harmonics ...
H. Jun, J. Shin, S. Kim, H. Choi
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Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry
Sensors, 2019 A method to characterize cross-linking differences in polymers such as waveguide polymers has been developed. The method is based on the scan-free information acquisition utilizing a low-coherence interferometer in conjunction with an imaging ...
Christopher Taudt +5 more
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