Results 221 to 230 of about 4,228 (259)
Some of the next articles are maybe not open access.
A study of piezoresistive pressure sensor technology
AIP Conference Proceedings, 2021The pressure sensor technology has grown to a large market since its discovery. These sensors are widely used in all spheres ranging from commercial, industrial, biomedical and even to military applications. This study tends to provide a review of the micro electro mechanical systems (M EMS) Piezoresistive Pressure Sensor Technology.
Lipika Gupta +2 more
openaire +1 more source
An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation
IEEE Transactions on Biomedical Engineering, 1973A thin-diaphragm piezoresistive pressure sensor for biomedical instrumentation has been developed using monolithic integratedcircuit (IC) techniques. The piezoresistive effect has been chosen for this device because it provides an observable resistance change that is a linear function of pressure and is observable at low stress levels.
, Samaun, K D, Wise, J B, Angell
openaire +2 more sources
Characterization of MEMS piezoresistive pressure sensors using AFM
Ultramicroscopy, 2010Atomic force microscope (AFM) is adapted to characterize an ultrasensitive piezoresistive pressure sensor based on microelectromechanical system (MEMS) technology. AFM is utilized in contact mode to exert force on several different micromachined diaphragm structures using a modified silicon cantilever with a particle attached to its end.
Suraj K, Patil +2 more
openaire +2 more sources
Temperature measurement using silicon piezoresistive MEMS pressure sensors
2014 29th International Conference on Microelectronics Proceedings - MIEL 2014, 2014In industrial processes, as well as in many other fields from vehicles to healthcare, temperature and pressure are the most common parameters to be measured and monitored. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, widely used in the industry in various measurement ...
Frantlović, Miloš +5 more
openaire +2 more sources
Ultrahigh-Sensitivity Piezoresistive Pressure Sensors for Detection of Tiny Pressure
ACS Applied Materials & Interfaces, 2018High-sensitivity pressure sensors are crucial for the ultrasensitive touch technology and E-skin, especially at the tiny-pressure range below 100 Pa. However, it is highly challenging to substantially promote sensitivity beyond the current level at several to 200 kPa-1 and to improve the detection limit lower than 0.1 Pa, which is significant for the ...
Hongwei Li +5 more
openaire +2 more sources
Piezoresistive sensors: the pressure goes on
Sensor Review, 1989Advancements in producing piezoresistive pressure sensors have opened up exciting new markets for these pressure determining devices. Up to 10 times more sensitive than the old transducers, and with response times as rapid as a millisecond, the new sensors are used in applications as diverse as automotive, hi‐fi, aerospace and medical equipment ...
openaire +1 more source
Differential pressure sensor using a piezoresistive cantilever
Journal of Micromechanics and Microengineering, 2012This paper reports on a differential pressure sensor using a piezoresistive cantilever with the dimensions of 125 ?m?100 ?m?0.3 ?m. The sensor has a higher sensitivity than a traditional diaphragm sensor because of the three free edges of the cantilever.
Hidetoshi Takahashi +3 more
openaire +1 more source
Design of piezoresistive MEMS absolute pressure sensor
SPIE Proceedings, 2012MEMS pressure sensors are one of the most widely commercialized microsensors in the MEMS industry. They have a plethora of applications in various fields including the automobile, space, biomedical, aviation and military sectors. One of the simplest and most efficient methods in MEMS pressure sensors for measuring pressure is to use the phenomenon ...
S. Kumar, B. D. Pant
openaire +1 more source
Piezoresistive biocompatible membranes for flexible pressure sensors
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, 2011The article reports a promising approach to engineering biocompatible and highly piezoresistive membranes for flexible weightless transparent pressure sensors. The developed membranes are based on bi layer (BL) films composing a polycarbonate (PC) matrix “self-metallized” with organic molecular metal β-(ET) 2 I 3 , were ET=bis(ethylenedithio ...
Vladimir Laukhin +4 more
openaire +1 more source
Temperature Characteristic of Platinum Piezoresistive Pressure Sensor
Key Engineering Materials, 2011Temperature characteristic of platinum piezoresistive atmosphere pressure sensor is studied in this paper, in which platinum is used as the sensing material and SU-8 is used as adhesive bonding layer. Normally, temperature variation will bring on resistance change of sensing platinum resistor with a linear relationship.
Li Dong Du +6 more
openaire +1 more source