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Piezoresistive Pressure Sensors
2020Information about pressure and its measurement by means of pressure sensors is interesting in many different application areas. Contemporary applications, as for example the automotive industry, aerospace and medical technology, require ever smaller, adaptable and highly accurate pressure sensors.
Stephanus Büttgenbach +3 more
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Differential Piezoresistive Pressure Sensor
2007 International Semiconductor Conference, 2007The pressure microsensor presented in this paper is based on a thin, elastic membrane, with boron implanted piezoresistive elements included, positioned in the maximum mechanical stress areas on the membrane. The pressure range for the developed sensors is in the 0divide400 mbar range, and this is the main novelty of this device.
B. Firtat +4 more
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A piezoresistive humidity sensor
Sensors and Actuators A: Physical, 1994Abstract This paper deals with a new type of humidity sensor. Whereas conventional humidity sensors utilize the change of the specific resistivity or the dielectric properties here the humidity induced volume change of a polyimide layer leads to a deformation of a silicon membrane.
G. Gerlach, K. Sager
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Nanocrystalline diamond piezoresistive sensor
Vacuum, 2009The design, fabrication and test of piezoresistive sensors based on nanocrystalline diamond (NCD) films are reported. The CoventorWare FEM calculations of the mechanical stress and geometrical deformations of a 3-D structure are used for a proper localization of the piezoresistor on the carrying substrate. The boron-doped piezoresistive sensing element
Pavel Kulha +6 more
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A Chipless Piezoresistive Strain Sensor
2023 17th European Conference on Antennas and Propagation (EuCAP), 2023Strain sensors are widely used in various applications and, depending on the specific application, it is necessary they operate completely wireless. The first step for the realization of a wireless strain sensor is the choice of the transducing material. Piezoresistive materials, whose surface impedance varies when a mechanical stimulus is applied, are
Rodini S., Genovesi S., Costa F.
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Monolithic piezoresistive CMOS magnetic field sensors
Sensors and Actuators A: Physical, 2003Abstract Two original electromechanical magnetic sensors have been developed using a fully industrial fabrication process that relies on bulk wet etching of CMOS dies. The first device uses the Lorentz force to actuate a U-shaped cantilever beam, while piezoresistive polysilicon gauges convert the beam bending into an electrical signal. A 2 μT sensor
Beroulle, Vincent +3 more
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An embedded polymer piezoresistive microcantilever sensor
Ultramicroscopy, 2003We have developed a new type of chemical microsensor based on piezoresistive microcantilever technology. In this embedded polymer microsensor, a piezoresistive microcantilever is partially "embedded" into a polymeric material. Swelling of the polymer upon analyte exposure is measured as a simple resistance change in the embedded cantilever.
Timothy L, Porter +4 more
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2009
In contrast to the fixed strain incorporated in logic devices for a fixed or constant improvement in device performance, piezoresistive strain sensors respond to variable strain through a modulation in the device resistance. The underlying physics of performance improvement in logic devices and strain transduction in piezoresistive strain sensors is ...
Yongke Sun +2 more
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In contrast to the fixed strain incorporated in logic devices for a fixed or constant improvement in device performance, piezoresistive strain sensors respond to variable strain through a modulation in the device resistance. The underlying physics of performance improvement in logic devices and strain transduction in piezoresistive strain sensors is ...
Yongke Sun +2 more
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A silicon piezoresistive pressure sensor
Proceedings First IEEE International Workshop on Electronic Design, Test and Applications '2002, 2003The paper describes the design, simulation and fabrication of a silicon pressure sensor. The device makes use a of monocrystalline silicon square diaphragm supported by a thick silicon rim. The diaphragm is fabricated by etching away the bulk silicon on a defined region until the required thickness is achieved.
R. Singh +3 more
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Piezoresistive sensors for smart textiles
SPIE Proceedings, 2007We have used inkjet printing to deposit silver conducting lines and small PEDOT (conducting polymer) sensors onto fabrics. The printed conductors penetrate into the fabric and can be shown to coat the individual fibers within the yarn, through the full thickness of the cloth.
Paul Calvert +5 more
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