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Analysis of hydrogen plasma in a microwave plasma chemical vapor deposition reactor
Journal of Applied Physics, 2016The aim of this work is to build a numerical model of hydrogen plasma inside a microwave plasma chemical vapor deposition system. This model will help in understanding and optimizing the conditions for the growth of carbon nanostructures. A 2D axisymmetric model of the system is implemented using the finite element high frequency Maxwell solver and the
G. Shivkumar +4 more
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The Interaction of the Supersonic Plasma‐Jet with the Substrate in the RF Plasma‐Chemical Reactor
Contributions to Plasma Physics, 1996AbstractAlthough the plasma‐chemical processes and properties of the deposited thin film can strongly depend on the interaction of the supersonic plasma jet channel with the substrate, up to now the study of this phenomenon has not yet been done. We decided to study this interaction by means of CCD camera.
M. Šícha +9 more
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Experimental research of ICP reactor for plasma-chemical etching
2015The results of systematic experimental researches of plasma-chemical etching reactor in the inductive mode are presented in this paper. Measurements of the integral discharge parameters (inductor voltage, gas pressure, input power) have been carried out as well as probe measurements of spatial distribution of local plasma parameters (plasma density ...
Dudin, S.V. +3 more
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Tomographic Diagnostics of Processes in Plasma-Chemical Reactor
38th Plasmadynamics and Lasers Conference, 2007Natalia Denisova +2 more
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PLASMA CHEMICAL SYNTHESIS OF METHANOL IN A BUBBLE REACTOR WITH METAL MELT
Химия высоких энергий / High Energy ChemistryThe results of modeling of nonequilibrium radical-chain synthesis of methanol in a bubble reactor with a metallic melt are presented. Modeling was performed for a mixture of methane and oxygen (O concentration 10–30 vol %) at pressure 10–40 atm, initial temperature 800–900 K and radical concentration CH 0.1–0.5 vol %.
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ADJUSTABLE HIGH VOLTAGE CONVERTER FOR PLASMA CHEMICAL REACTOR
Интеллектуальная электротехника, 2020A.I. Serov +3 more
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