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Novel poly-Si/Al/sub 2/O/sub 3//poly-Si capacitor for high density DRAMs
1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216), 2002A poly-Si/Al/sub 23//poly-Si capacitor is developed for the simple integration of 256 Mb DRAM and beyond. The oxide equivalent thickness (T/sub oxeq/) was achieved as small as 28 /spl Aring/, which corresponds to the capacitance of 26.8 fF/cell in 256 Mb DRAM with 0.26 /spl mu/m feature size. One of the distinguished characteristics of Al/sub 2/O/sub 3/
null Yeong Kwan Kim +5 more
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2009
24th European Photovoltaic Solar Energy Conference, 21-25 September 2009, Hamburg, Germany; 2510 ...
Ohdaira, K. +5 more
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24th European Photovoltaic Solar Energy Conference, 21-25 September 2009, Hamburg, Germany; 2510 ...
Ohdaira, K. +5 more
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Effect of Copper on the Breakthrough Voltage of Poly-Si - Poly-Si Capacitors
Solid State Phenomena, 2001M. Boehringer +10 more
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Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials, 1994
K. Hamada +5 more
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K. Hamada +5 more
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Poly-Si TFT Technology and Architecture
2013This chapter discusses the fabrication of high quality poly-Si films, by the industry standard technique of excimer laser crystallisation of a-Si:H precursor films. Alternative crystallisation procedures are also reviewed, including metal-induced solid phase crystallisation, as well as advanced procedures for achieving large grain and high mobility ...
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2000
Formation of a p+ poly-Si gate by using the stacked poly-Si layers that are nitridized by using inductively coupled nitrogen plasma (ICNP) has been studied. The stacked poly-Si gate structure consists of three poly-Si layers with thickness of 50, 50, and 100 nm, respectively.
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Formation of a p+ poly-Si gate by using the stacked poly-Si layers that are nitridized by using inductively coupled nitrogen plasma (ICNP) has been studied. The stacked poly-Si gate structure consists of three poly-Si layers with thickness of 50, 50, and 100 nm, respectively.
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Roles of mRNA poly(A) tails in regulation of eukaryotic gene expression
Nature Reviews Molecular Cell Biology, 2021Lori A Passmore +2 more
exaly
Monolithic Integration of Ni-SPC Poly-Si TFTs and Lateral Large-grained Poly-Si TFTs
Extended Abstracts of the 2010 International Conference on Solid State Devices and Materials, 2010A. Hara, K. Kondo, T. Sato
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