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Near-Infrared Spectral MEMS Gas Sensor for Multi-Component Food Gas Detection. [PDF]

open access: yesMicromachines (Basel)
Yan X   +9 more
europepmc   +1 more source

Hole-Selective SiN x and AlO x Tunnel Nanolayers for Improved Polysilicon Passivating Contacts. [PDF]

open access: yesACS Appl Energy Mater
McNab S   +10 more
europepmc   +1 more source
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Capacitance Voltage Characteristics of Polysilicon–Polysilicon Oxide–Polysilicon Structures for Three-Dimensional Memory

MRS Proceedings, 2000
ABSTRACTThree-dimensional integration offers a dramatic reduction in chip area required per bit and has long been a research objective. Three-dimensional integration with thin film transistors (TFTs) requires detailed parametric analysis with techniques such as Capacitance-Voltage (CV) Characterization.
John R. Lindsey, T. S. Kalkur
openaire   +1 more source

Polysilicon angular microvibromotors

Journal of Microelectromechanical Systems, 1992
Two types of LPCVD polysilicon angular microvibromotors were designed, fabricated, and successfully operated in air and in vacuum. Each utilizes an electrostatically driven lateral resonant structure (the converter) to actuate a circular microrotor by means of oblique mechanical impact.
A.P. Lee, A.P. Pisano
openaire   +2 more sources

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