Results 141 to 150 of about 1,972 (161)
Some of the next articles are maybe not open access.
Amorphous and polysilicon devices
1994Polysilicon is made up of silicon grains, each grain being a crystal in which the silicon atoms are arranged in a periodic structure. The distance between 0 two silicon atoms in the crystal is 2 – 3 A, and the typical size of a grain in polysilicon is 1, 000 – 10, 000 A. Thus each grain contains many millions of atoms.
openaire +1 more source
Process optimization for polysilicon-thermal oxide-polysilicon capacitors
Microelectronics Reliability, 1996openaire +1 more source