Results 21 to 30 of about 28,375 (268)
Modeling and random search optimization for the polysilicon CVD reactor
Results in Control and Optimization, 2023 Polysilicon is mainly obtained by the Siemens process chemical vapor deposition (CVD) reaction, in which hydrogen gas and trichlorosilane (TCS) are fed into the CVD reactor to produce polysilicon.
Bangwen Xi +7 more
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Characteristics and Breakdown Behaviors of Polysilicon Resistors for High Voltage Applications
Advances in Condensed Matter Physics, 2015 With the rapid development of the power integrated circuit technology, polysilicon resistors have been widely used not only in traditional CMOS circuits, but also in the high voltage applications.
Xiao-Yu Tang, Ke Dong
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Proceedings, 2017 This paper reports on polysilicon piezo-resistors that are fabricated at a low thermal budget using aluminium-induced-crystallization (AIC) of ultra-high-vacuum e-beam evaporated silicon films.
Ian Chuang, Aron Michael, Chee Yee Kwok
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Role of polysilicon in poly-Si/SiOx passivating contacts for high-efficiency silicon solar cells
RSC Advances, 2019 In this study, we focused on understanding the roles of a polysilicon (poly-Si) layer in poly-Si/SiOx/c-Si passivating contacts. Passivating contact formation conditions were varied by changing the doping method, annealing temperature and time ...
Hyunjung Park +10 more
semanticscholar +1 more source
Multilayer Micromechanics Process with Thick Functional Layers (EPyC40)
Proceedings, 2017 The EPyC process (Epi-Poly-Cycle) (by Robert Bosch GmbH) opens up unique opportunities for manufacturing complex 3D MEMS structures having high effectiveness in small space.
Latifa Louriki +3 more
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Micromachines, 2018 In this work, we provide a numerical/experimental investigation of the micromechanics-induced scattered response of a polysilicon on-chip MEMS testing device, whose moving structure is constituted by a slender cantilever supporting a massive perforated ...
Ramin Mirzazadeh +2 more
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EPJ Photovoltaics, 2021 Polysilicon-on-oxide (POLO) passivating contacts and interdigitated back-contact (IBC) cell technologies have recently attracted a lot of interest as candidates for the implementation in the next generation of solar cells. An IBC cell with POLO junctions
Rienäcker Michael +5 more
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Uncertainty Quantification of Microstructure—Governed Properties of Polysilicon MEMS
Micromachines, 2017 In this paper, we investigate the stochastic effects of the microstructure of polysilicon films on the overall response of microelectromechanical systems (MEMS).
Ramin Mirzazadeh, Stefano Mariani
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Piezoresistance in polysilicon
Electronics Letters, 1984 A theoretical model for piezoresistance in polysilicon is described. Grain size, orientation and doping dependence effects are included. Predictions of gauge factor using the model give reasonable agreement with experimental results and enable optimum processing parameters to be chosen for a given grain size.
French, PJ, Evans, A G R
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Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer
Sensors, 2012 In this paper, the mechanical response of a commercial off-the-shelf, uni-axial polysilicon MEMS accelerometer subject to drops is numerically investigated.
Sarah Zerbini +3 more
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