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Localized Deposition of Polysilicon for MEMS Post-Fabrication Processing
Micro-Electro-Mechanical Systems (MEMS), 1999Abstract In this paper, the localized deposition of polysilicon is demonstrated on suspended and attached microbeams. The microbeams are 1, 2 and 5μm wide; 0.5, 1.5 and 2μm thick; and 50 and 100 μm long. Polysilicon is deposited by thermal decomposition of silane gas on the electrically-heated structures.
Daphne Joachim, Liwei Lin
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Post-Processing of Pulsed Laser-Deposited Pzt Thin Films
MRS Proceedings, 1991AbstractPZT thin films were prepared by pulsed laser deposition on unheated Ptcoated Si substrates. As deposited, the films were amorphous. Films crystallized at 550 - 600 °C to produce predominantly crystalline ferroelectric PZT. Crystallization of the amorphous material was accompanied by a linear shrinkage of ∼2 %, as manifested in development of ...
C. K. Chiang +7 more
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Post-deposition processing and oxygen content of TiO2-based capacitors
Microelectronic Engineering, 2011Properties of TiO"2-based capacitors with RuO"2 bottom electrode were examined. It is shown that post-deposition room temperature plasma treatment and oxygen annealing at 300^oC significantly reduces amount of impurities in the TiO"2 layer. Leakage current density of the capacitors is suppressed due to improvement of oxygen stoichiometry and increase ...
K. Fröhlich +7 more
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Post processing of the layer deposited by electric discharge coating
Materials and Manufacturing Processes, 2016ABSTRACTElectric discharge coating is a deposition process that can deposit thin and thick films using electric discharge machine. In the present experimental investigation, W–Cu powder metallurgical electrodes of 325 mesh size have been used as electrodes for the deposition process.
Eswara Krishna Mussada, P. K. Patowari
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Potassium post deposition treatment of solution-processed kesterite solar cells
Thin Solid Films, 2017Potassium post deposition treatment (K-PDT) has been a major breakthrough for CIGSSe (Cu(In,Ga)(S,Se)2) solar cells yielding world record efficiencies. K-PDT yields significant improvements in open circuit voltage, fill factor and allows thinning CdS thus leading to efficiencies above 20% for CIGSSe material.
S.G. Haass +4 more
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Post-Processing of Cold-Spray Deposits of Copper and Iron
International Thermal Spray Conference, 2000Abstract Layers of high-purity copper and iron produced by cold gas-dynamic spraying have been thermally processed to induce recrystallization and grain growth. In the case of copper deposits, the as-sprayed structure could be "pinned" by arrays of Cu2O particles present on the surfaces of the feedstock powder, however copper powders of ...
R.C. McCune, R.P. Cooper, O.O. Popoola
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1989
Since the recent discovery of materials that exhibit superconductivity above 90K, there has been much interest in the preparation of thin films and coatings of these materials for numerous electronic applications. To date, most of the effort in thin film preparation has centered on physical vapor deposition techniques.
J. Zhao +5 more
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Since the recent discovery of materials that exhibit superconductivity above 90K, there has been much interest in the preparation of thin films and coatings of these materials for numerous electronic applications. To date, most of the effort in thin film preparation has centered on physical vapor deposition techniques.
J. Zhao +5 more
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The effects of post-deposition processes on polysilicon Young's modulus
Journal of Micromechanics and Microengineering, 1998Polysilicon films deposited by low pressure chemical deposition (LPCVD) are the most widely used structural material for microelectromechanical systems (MEMS). However, the properties of LPCVD polysilicon are known to vary significantly, depending on deposition conditions as well as post-deposition processes.
Sangwoo Lee +6 more
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Effect of Post-Deposition Thermal Processing
2016The quality of surface passivation provided by Al\(_2\)O\(_3\) depends not only on the deposition conditions, but also on subsequent thermal processing. Indeed for Al\(_2\)O\(_3\) films deposited at lower temperatures, some thermal treatment is generally required to “activate” the passivation.
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Optimization of vapor post-deposition processing for evaporated CdS/CdTe solar cells
Progress in Photovoltaics: Research and Applications, 1999The effects of thermal annealing in conjunction with CdCl2 vapor heat treatment on the properties of CdTe/CdS thin films and devices deposited by physical vapor deposition are reported. Results are compared for three treatment variations: high-temperature anneal only, high-temperature anneal followed by CdCl2 vapor heat treatment and CdCl2 vapor heat ...
B. E. McCandless +2 more
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