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A large range noncontact profilometer
SPIE Proceedings, 2006Focus detection method is one of the primary non-contact measurement methods of surface topography. However, the measuring range of traditional focus detection method is limited because the volume motor is adopted in the focus servo system. The traditional method has inevitable non-linear error and other measurement error caused by the volume motor.
Xudong Yang, Tiebang Xie
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Interferometric laser profilometer for rough surfaces
Optics Letters, 1991A simple synthetic-wavelength interferometer is reported that uses two wavelengths of a multimode laser diode. The difference in interferometric phase measurements at the two wavelengths provides absolute range information to an accuracy of 0.75 microm over an ambiguity interval of 310 microm. The instrument can be used to profile surfaces too rough to
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Optical Heterodyne Profilometer
Optical Engineering, 1984An optical heterodyne profilometer breadboard with surface roughness measurement sensitivity to 0.1 A has been developed and demonstrated. Optical and electronic common-mode rejection techniques were employed in the optical heterodyne precision phase measurement scheme to resolve the optical phase to one part in thirty thousand.
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Optisches Autofokus-Profilometer / Optical autofocussing profilometer
teme, 1993openaire +1 more source
Dispersive interferometric profilometer: erratum
Optics Letters, 1995J, Schwider, L, Zhou
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