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A tandem radio-frequency plasma torch

Journal of Applied Physics, 1988
The flow and temperature fields in a tandem radio-frequency (rf) plasma torch were calculated. The method employed here is based on our previous rf plasma model. The flow and temperature fields of this tandem plasma show similar features to those of a dc-rf hybrid plasma, and the carrier gas can be injected into the high-temperature region (∼9000 °C ...
Takashi Uesugi   +3 more
openaire   +1 more source

Surface plasma source with saddle antenna radio frequency plasma generator

Review of Scientific Instruments, 2012
A prototype RF H− surface plasma source (SPS) with saddle (SA) RF antenna is developed which will provide better power efficiency for high pulsed and average current, higher brightness with longer lifetime and higher reliability. Several versions of new plasma generators with small AlN discharge chambers and different antennas and magnetic field ...
V, Dudnikov   +7 more
openaire   +2 more sources

Radio-frequency fields in magnetoactive plasma

Journal of Applied Physics, 1974
Electric field componenets produced by a single-turn current sheet concentric with a finite magnetoactive plasma cylinder are calculated for frequencies corresponding to resonant peaks in the series loading resistance near the lower hybrid resonance. The radial electric fields are found to be quite large and to penetrate well into the plasma.
C. R. Skipping   +2 more
openaire   +1 more source

Radio Frequency Distortion in Plasmas

1968 IEEE Electromagnetic Compatibility Symposium Record, 1968
RF harmonic and intermodulation distortion produced by glow discharge and high energy flame plasmas during electromagnetic wave ...
openaire   +1 more source

Resonances In A Radio-frequency Plasma

Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS), 2005
This abstract reports new observations of resonances in the parallel plate plasma reactors and the theory of series resonance is in reasonable agreement with the experimental data. The measurements were performed in a capacitively coupled plasma reactor by feeding the RF voltage at 13.56 MHz to one of the parallel plates, the driven electrode, with a ...
V.P.T. Ku, B.M. Annaratone, J.E. Allen
openaire   +1 more source

LiNbO3 exposed to radio-frequency plasma

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1998
Abstract Radio-frequency (27.12 MHz) glow discharge in H 2 and O, have been used for surface modification of LiNbO 3 wafers. The properties of plasma modified surface layers were dependent on the gas pressure and radio frequency (RF) input power. At pressures below 1 Torr of H 2 and input powers of 1–10 W/cm 3 , a low-resistance layer was created
H Turcicova   +7 more
openaire   +1 more source

Pulsed Plasma Radio Frequency Interference Studies.

1977
Abstract : An unshielded external test set was developed which allows the millipound thrust level pulsed plasma thruster to be repetitvely operated in air. The present design was operated at a peak discharge current of 47 kiloamperes. Electromagnetic emission tests carried out showed that the present unshielded test set would have to be shielded if the
William Gunman, Martin Begun
openaire   +1 more source

Radio‐Frequency Plasma Spraying of Ceramics

Journal of the American Ceramic Society, 1989
This study was aimed at developing a novel spraying process using a radio‐frequency (rf) plasma. Experiments of Al 2 O 3 and ZrO 2 –8 wt% Y 2 O 3
Tomohisa Okada   +2 more
openaire   +1 more source

Charged-species profiles in electronegative radio-frequency plasmas

Physical Review E, 1995
The negative ion density profile in a low pressure oxygen rf plasma has been measured by a photodetachment technique. At an rf power of 10 W and a neutral pressure of 10 mTorr, a parabolic negative ion density profile is obtained with a peak density of 8\ifmmode\times\else\texttimes\fi{}${10}^{15}$ ${\mathrm{m}}^{\mathrm{\ensuremath{-}}3}$ and a ...
, Vender   +4 more
openaire   +2 more sources

Negative ions in a radio-frequency oxygen plasma

Physical Review E, 1995
A systematic study of a low pressure (5--200 mTorr) oxygen discharge is presented. Measurements of the electron and negative ion densities in the 13.56 MHz capacitively coupled plasma are performed by means of a microwave resonance technique in combination with photodetachment.
, Stoffels   +5 more
openaire   +2 more sources

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