Results 251 to 260 of about 165,018 (295)

Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas

Applied Physics Letters, 2006
An industrial, confined, dual frequency, capacitively coupled, radio-frequency plasma etch reactor (Exelan®, Lam Research) has been modified for spatially resolved optical measurements. Space and phase resolved optical emission spectroscopy yields insight into the dynamics of the discharge.
Gans, Timo, Schulze, J., O'Connell, D., Czarnetzki, U., Faulkner, R., Ellingboe, A.R., Turner, M.M.   +6 more
openaire   +2 more sources

Plasma sheath thickness in radio-frequency discharges

Journal of Applied Physics, 1990
The radio-frequency glow discharges of several kinds of gases were examined to measure the ion sheath thickness at the cathode electrode. At intermediate gas pressures around 0.05– 0.5 Torr, the sheath thickness d depends on the pressure P in the expression P1/2d=K0 for almost all of the discharges examined. It was also pointed out that the constant K0
Nobuki Mutsukura, Kenji Kobayashi, Yoshio Machi   +2 more
openaire   +1 more source

Radio-frequency heating of a plasma

Canadian Journal of Physics, 1970
If a uniform plasma is surrounded by a heating coil in the presence of a steady axial magnetic field, it is shown that a considerable increase in power absorption may be expected if the operating frequency is chosen to be close to a magneto-acoustic resonance of the plasma column. This effect is due to a very large increase in the oscillating field at
openaire   +1 more source

Macroscopic modeling of radio-frequency plasma discharges

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1989
We describe a self-consistent model of a symmetric plane parallel rf discharge. The model is built upon basic laws such as conservation of particles and energy, and is capable of predicting rapidly the important discharge parameters from a processing point of view, such as the ion energy and flux to the electrodes. The following physics is incorporated
G. R. Misium, A. J. Lichtenberg, M. A. Lieberman   +2 more
openaire   +1 more source

Effects of radio frequency waves on plasmas

Radiation Effects and Defects in Solids, 2013
The interaction of radio frequency waves as it propagates through a plasma medium – has fascinated the plasma physicists for decades. The ionosphere is crucial for radio wave propagation.
J.J. Martinell, S. Sen, G. Vahala
openaire   +1 more source

Inductively coupled radio frequency methane plasma simulation

Journal of Physics D: Applied Physics, 2001
A self-consistent two-dimensional radio frequency inductively coupled glow discharge model has been developed in cylindrical coordinates using a fluid model. The objective of the study is to provide insight into charged species dynamics and investigate their effects on plasma process for a methane discharge.
K Bera, B Farouk, P Vitello
openaire   +1 more source

Radio Frequency Induction Plasma Spraying of Molybdenum

Plasma Science and Technology, 2003
Radio frequency (RF) induction plasma was used to make free-standing deposition of molybdenum (Mo). The phenomena of particle melting, flattening, and stacking were investigated. The effect of process parameters such as plasma power, chamber pressure, and spray distance on the phenomena mentioned above was studied.
Jiang Xianliang, Maher Boulos
openaire   +1 more source

Monitoring of radio-frequency glow-discharge plasma

Journal of Applied Physics, 1989
The optical emission profile (OEP) between anode and cathode electrodes is examined for monitoring planar rf discharges of H2, N2, and Ar gases. Form the OEP we can easily find the boundary of the ion sheath and the plasma region and accordingly the ion sheath width at the cathode electrode.
Nobuki Mutsukura, Kenji Kobayashi, Yoshio Machi   +2 more
openaire   +1 more source

Radio-frequency heating of fusion plasmas

1998
VTT Energy co-ordinates the national FFUSION research programme and the Finnish activities in the European fusion programme. Finnish fusion research was integrated into the European programme by the contract of association between Tekes and Euratom, which defines the research areas of the Association Euratom-Tekes.
Heikkinen, Jukka, Karttunen, Seppo, Pättikangas, Timo   +3 more
openaire   +3 more sources

The inductively coupled R.F. (radio frequency) plasma

Pure and Applied Chemistry, 1985
Abstract
openaire   +1 more source