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Negative ions in a radio-frequency oxygen plasma
Physical Review E, 1995A systematic study of a low pressure (5--200 mTorr) oxygen discharge is presented. Measurements of the electron and negative ion densities in the 13.56 MHz capacitively coupled plasma are performed by means of a microwave resonance technique in combination with photodetachment.
, Stoffels +5 more
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Physics of Radio-Frequency Plasmas
2011Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering.
Chabert, Pascal, Braithwaite, Nicholas
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A tandem radio-frequency plasma torch
Journal of Applied Physics, 1988The flow and temperature fields in a tandem radio-frequency (rf) plasma torch were calculated. The method employed here is based on our previous rf plasma model. The flow and temperature fields of this tandem plasma show similar features to those of a dc-rf hybrid plasma, and the carrier gas can be injected into the high-temperature region (∼9000 °C ...
Takashi Uesugi +3 more
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Radio-frequency coupling to plasmas
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1988A survey of the physics associated with coupling rf power to plasmas is given with emphasis on methods of analysis relevant to applications in the fields of plasma production, processing, and fusion research. The significance of resonant versus nonresonant coupling methods is discussed and specific applications are described where these phenomena ...
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Radio-frequency heating of a plasma
Canadian Journal of Physics, 1970If a uniform plasma is surrounded by a heating coil in the presence of a steady axial magnetic field, it is shown that a considerable increase in power absorption may be expected if the operating frequency is chosen to be close to a magneto-acoustic resonance of the plasma column. This effect is due to a very large increase in the oscillating field at
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Laser Diagnostic of Radio-Frequency Oxygen Plasma
1990We started the investigation of radio-frequency discharges of oxygen-noble mixtures because they are known to be efficient “generators” of atomic oxygen. In addition the discharge, in absence of chemical reactions at the electrodes, is particularly clean to allow high resolution laser spectroscopy investigations [1],[2],[3] which were our main purpose.
TINO, GUGLIELMO MARIA +3 more
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Micro-arcing in radio frequency plasmas
Journal of Physics D: Applied Physics, 2004Micro-arcing and breakdown of the wall plasma sheath in radio frequency (RF) plasmas is studied in a hollow cathode system, using a Langmuir probe to measure the floating potential. Micro-arcing was induced reproducibly by controlling the floating potential. By dc grounding the hollow cathode, a negative current can flow to ground resulting in a higher
Y Yin +4 more
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Radio‐frequency plasma‐display cell
Journal of the Society for Information Display, 2003Abstract— This paper demonstrates that it is possible to improve the basic parameters of plasma displays (efficiency, primarily) using AC voltages with frequencies so high that the amplitude of the electron‐drift oscillations is smaller than the inter‐electrode gap.
N. Bogatov, Yu. Brodsky, S. Golubev
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Plasma Resonance in a Radio-Frequency Probe
Physical Review Letters, 1960When the frequency of a low-voltage r-f signal superposed on a probe was swept within an adequate frequency range, the d-c component of the electron current due to the nonlinearity of the sheath impedance was measured. lt was found that a resonant increase appeared in the current at the electron plasma frequency, omega /sub p/ = (4 pi N/sub 0/e/sup 2/m)
K. Takayama, H. Ikegami, S. Miyazaki
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Radio Frequency Distortion in Plasmas
1968 IEEE Electromagnetic Compatibility Symposium Record, 1968RF harmonic and intermodulation distortion produced by glow discharge and high energy flame plasmas during electromagnetic wave ...
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