Results 121 to 130 of about 806 (172)
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RCWA acceleration for channel-hole structures with a neural network
Modeling Aspects in Optical Metrology IX, 2023Yoonsung Bae +2 more
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Phase calculation of diffraction grating based on RCWA
Holography, Diffractive Optics, and Applications XIII, 2023Shihao Kang
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Isolation mounts scatterometry with RCWA and PML
Proceedings of SPIE, 2014In this paper, we examine the sensitivity of scatterometry for the 3D isolation mounts on the substrate by applying PML in RCWA. We analyze the reflectance from the silicon and resist single mount and the silicon double mounts on the silicon substrate. First, we investigate the beam width dependences of reflectance.
Hirokimi Shirasaki
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Applications of RCWA on EUV mask optics
International Conference on Extreme Ultraviolet Lithography 2017, 2017The oblique illumination in EUVL system combined with relative thick absorber layer of EUV mask introduces many new challenges for mask simulation, like asymmetric phase deformation, shadowing effects , secondary scattering. Besides, these effects result in the ineffectiveness of the Hopkins approach and require new method for mask diffraction ...
Taian Fan, Yayi Wei
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3D isolation mounts scatterometry with RCWA and PML
Proceedings of SPIE, 2015Hirokimi Shirasaki
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RCWA-EIS method for interlayer grating coupling
Applied Optics, 2016The grating coupling efficiencies for interlayer connection (overlaid chips) were previously calculated using the new rigorous coupled-wave analysis equivalent-index-slab (RCWA-EIS) method. The chip-to-chip coupling efficiencies were determined for rectangular-groove (binary) gratings.
Congshan, Wan +2 more
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Reflectivity Analysis of Isolated Particle on a Substrate on Incoherent Light by RCWA
OSA Imaging and Applied Optics Congress 2021 (3D, COSI, DH, ISA, pcAOP), 2021We analyze the reflectivity of a film and rectangle with incoherent behavior by rigorous coupled-wave analysis. The sample was Rhodamine B on a transparent substrate, and its absorption spectrum was measured and simulated.
Tetsuya Hoshino +3 more
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Modelling of magneto photonic waveguide using RCWA
SPIE Proceedings, 2008Magneto photonic crystals exhibit unique combination of magneto-optical nonreciprocity and resonant behavior originating from periodic structure. Modeling of magneto photonic structures requires inclusion of magnetic induced anisotropy and description of medium using a permittivity tensor.
K. Postava +6 more
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Normal vector method for convergence improvement using the RCWA for crossed gratings
Journal of the Optical Society of America A, 2007The rigorous coupled wave analysis (RCWA) is a widely used method for simulating diffraction from periodic structures. Since its recognized formulation by Moharam [J. Opt. Soc. Am. A12, 1068 and 1077 (1995)], there still has been a discussion about convergence problems.
Thomas, Schuster +4 more
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Analysis of optical propagation characteristics of the ultra-long period grating using RCWA
Applied Optics, 2023There have been significant research and analyses on the diffraction efficiency and characteristics of spectral grating with a wavelength-scale period. However, thus far an analysis on a diffraction grating with an ultra-long pitch over several hundred times of the wavelength (>100µm) and a very deep groove over dozens of micrometers has not been ...
Yong-Jae Lee +3 more
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