Results 141 to 150 of about 806 (172)

Simulation of sub-wavelength 3D photomask induced polarization effect by RCWA

SPIE Proceedings, 2012
In 45nm technology node and beyond with hyper NA and Off-axis Illumination (OAI) lithography, mask induced polarization effect is remarkable. At this scale, traditional Kirchhoff approximation, in which the masks are considered to be infinitely thin objects, is no longer valid.
Liang Yang, Yanqiu Li, Lihui Liu, Jianfeng Wang   +3 more
openaire   +1 more source

MoM/RCWA analysis of frequency selective surfaces with inhomogeneous, periodic substrates

2007 18th International Zurich Symposium on Electromagnetic Compatibility, 2007
This paper presents a numerical technique for the analysis of a metamaterial that may be considered as a new type of frequency selective surfaces (FSS), consisting of printed metal patches on inhomogeneous, periodic substrates. Such structures are more promising for EMC shielding than common FSS structures because both the effective dielectric ...
Arya Fallahi, Christian Hafner, Rudiger Vahldieck   +2 more
openaire   +1 more source

Diffraction of Gaussian laser beam with finite crosssection on a gtaing using RCWA

2019 IEEE 8th International Conference on Advanced Optoelectronics and Lasers (CAOL), 2019
Developed a method based on RCWA analysis of the diffraction of a laser beam with a finite cross-section on a grating. The method is effective in the occurrence of waveguide resonance in the grating and corresponds to the law of conservation of energy. The application of the method is demonstrated on the diffraction of the Gaussian laser beam.
V.M. Fitio, A.V. Bendziak, I.Y. Yaremchuk, Y.V. Bobitski   +3 more
openaire   +1 more source

Combining diffraction efficiency measurements with RCWA for high-precision grating characterization

Modeling Aspects in Optical Metrology X
Arpit Gupta, Deblina Sabui, Joby Joseph   +2 more
exaly   +2 more sources

Scatterometry simulator development with GPU, real-coded GA and RCWA

SPIE Proceedings, 2013
In this paper, we show the 2D and 3D scatterometry simulation software which has spectroscopy calculation and optimization algorithm systems. The scatterometry analysis for 3D-structure requires a lot of memory and along calculation time. The calculation is sped up by parallel computing using the GPU (Graphics Processor Unit).
openaire   +1 more source

Efficient and Stable Implementation of RCWA for Ultrathin Multilayer Gratings: T-Matrix Approach Without Solving Eigenvalues

IEEE Antennas and Wireless Propagation Letters, 2021
Lihua Shi, Yao Ma, Yuzhou Ran
exaly  

Fast Fourier factorization for differential method and RCWA: a powerful tool for the modeling of non-lamellar metallic diffraction gratings

Optical and Quantum Electronics, 2020
Habib Mohamad, Sylvain Blaize, Pierre Benech   +2 more
exaly  

Multi-Objective Optimization of all-Dielectric Metasurfaces Using 2D RCWA Algorithm For Sensing Applications

2022
Abdullah Bin Shams, Mo Mojahedi, J Stewart Aitchison   +2 more
exaly  

GPU libraries speed performance analysis for RCWA simulation matrix operations

2023
Jingxiao Xu, Martin D B Charlton
exaly  

Rigorous Coupled-Wave Analysis: RCWA

Kotaro Kajikawa, Takayuki Okamoto
openaire   +1 more source