Results 151 to 160 of about 1,677 (197)
Some of the next articles are maybe not open access.
RCWA acceleration for channel-hole structures with a neural network
Modeling Aspects in Optical Metrology IX, 2023Myungjun Lee, Wookrae Kim
exaly +2 more sources
Isolation mounts scatterometry with RCWA and PML
Proceedings of SPIE, 2014In this paper, we examine the sensitivity of scatterometry for the 3D isolation mounts on the substrate by applying PML in RCWA. We analyze the reflectance from the silicon and resist single mount and the silicon double mounts on the silicon substrate. First, we investigate the beam width dependences of reflectance.
Hirokimi Shirasaki
exaly +2 more sources
Applications of RCWA on EUV mask optics
International Conference on Extreme Ultraviolet Lithography 2017, 2017The oblique illumination in EUVL system combined with relative thick absorber layer of EUV mask introduces many new challenges for mask simulation, like asymmetric phase deformation, shadowing effects , secondary scattering. Besides, these effects result in the ineffectiveness of the Hopkins approach and require new method for mask diffraction ...
Yayi Wei, Taian Fan, Lisong Dong
exaly +2 more sources
RCWA-EIS method for interlayer grating coupling
Applied Optics, 2016The grating coupling efficiencies for interlayer connection (overlaid chips) were previously calculated using the new rigorous coupled-wave analysis equivalent-index-slab (RCWA-EIS) method. The chip-to-chip coupling efficiencies were determined for rectangular-groove (binary) gratings.
Congshan, Wan +2 more
openaire +2 more sources
3D isolation mounts scatterometry with RCWA and PML
Proceedings of SPIE, 2015Hirokimi Shirasaki
exaly +2 more sources
The paper presents the further development of our established and well-proven RCWA based full 3D mask solver which was restructured to enable highly parallelized fast simulations of larger mask areas with curvilinear structures.
Andreas Erdmann, Peter Evanschitzky
exaly +2 more sources
Reflectivity Analysis of Isolated Particle on a Substrate on Incoherent Light by RCWA
OSA Imaging and Applied Optics Congress 2021 (3D, COSI, DH, ISA, pcAOP), 2021We analyze the reflectivity of a film and rectangle with incoherent behavior by rigorous coupled-wave analysis. The sample was Rhodamine B on a transparent substrate, and its absorption spectrum was measured and simulated.
Tetsuya Hoshino +3 more
openaire +1 more source
Modelling of magneto photonic waveguide using RCWA
SPIE Proceedings, 2008Magneto photonic crystals exhibit unique combination of magneto-optical nonreciprocity and resonant behavior originating from periodic structure. Modeling of magneto photonic structures requires inclusion of magnetic induced anisotropy and description of medium using a permittivity tensor.
K. Postava +6 more
openaire +1 more source
Efficient computation scheme of grating structure using RCWA and FDFD
2011 International Conference on Computational Problem-Solving (ICCP), 2011Rigorous coupled-wave analysis, a classic approach for calculating grating structures, will be very slow in some cases, as involved lots of matrix's eigenvalue problems. The use of finite-difference frequency-domain can avoid eigenvalue problem by introduce a large number of difference calculations.
Qiang Xiong, Shuqiang Chen, Yanfang Hu
openaire +1 more source
Normal vector method for convergence improvement using the RCWA for crossed gratings
Journal of the Optical Society of America A, 2007The rigorous coupled wave analysis (RCWA) is a widely used method for simulating diffraction from periodic structures. Since its recognized formulation by Moharam [J. Opt. Soc. Am. A12, 1068 and 1077 (1995)], there still has been a discussion about convergence problems.
Thomas, Schuster +4 more
openaire +2 more sources