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Analytical waveguide model for EUV masks: insights and comparison with RCWA

40th European Mask and Lithography Conference (EMLC 2025)
Varun Jadhav, Andreas Erdmann
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Optical Characterization of Moiré Photonic Crystals Using the RCWA Method

2024 XVIII National Meeting on Optics and the IX Andean and Caribbean Conference on Optics and its Applications (ENO-CANCOA)
J. F. Calderon, Carlos A. Galindez
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