Results 131 to 140 of about 807 (172)
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3D isolation mounts scatterometry with RCWA and PML
Proceedings of SPIE, 2015Hirokimi Shirasaki
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RCWA-EIS method for interlayer grating coupling
Applied Optics, 2016The grating coupling efficiencies for interlayer connection (overlaid chips) were previously calculated using the new rigorous coupled-wave analysis equivalent-index-slab (RCWA-EIS) method. The chip-to-chip coupling efficiencies were determined for rectangular-groove (binary) gratings.
Congshan, Wan +2 more
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Reflectivity Analysis of Isolated Particle on a Substrate on Incoherent Light by RCWA
OSA Imaging and Applied Optics Congress 2021 (3D, COSI, DH, ISA, pcAOP), 2021We analyze the reflectivity of a film and rectangle with incoherent behavior by rigorous coupled-wave analysis. The sample was Rhodamine B on a transparent substrate, and its absorption spectrum was measured and simulated.
Tetsuya Hoshino +3 more
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Modelling of magneto photonic waveguide using RCWA
SPIE Proceedings, 2008Magneto photonic crystals exhibit unique combination of magneto-optical nonreciprocity and resonant behavior originating from periodic structure. Modeling of magneto photonic structures requires inclusion of magnetic induced anisotropy and description of medium using a permittivity tensor.
K. Postava +6 more
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Normal vector method for convergence improvement using the RCWA for crossed gratings
Journal of the Optical Society of America A, 2007The rigorous coupled wave analysis (RCWA) is a widely used method for simulating diffraction from periodic structures. Since its recognized formulation by Moharam [J. Opt. Soc. Am. A12, 1068 and 1077 (1995)], there still has been a discussion about convergence problems.
Thomas, Schuster +4 more
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Analysis of optical propagation characteristics of the ultra-long period grating using RCWA
Applied Optics, 2023There have been significant research and analyses on the diffraction efficiency and characteristics of spectral grating with a wavelength-scale period. However, thus far an analysis on a diffraction grating with an ultra-long pitch over several hundred times of the wavelength (>100µm) and a very deep groove over dozens of micrometers has not been ...
Yong-Jae Lee +3 more
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The RCWA is also an efficient tool for waveguide computational problems
Diffractive Optics and Micro-Optics, 2000We show that, with only a very few modifications, the rigorous coupled wave analysis can be used efficiently for the numerical analysis of waveguide problems. This work extends the domain of applications of grating theories.
Philippe Lalanne, Eric Silberstein
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Efficient computation scheme of grating structure using RCWA and FDFD
2011 International Conference on Computational Problem-Solving (ICCP), 2011Rigorous coupled-wave analysis, a classic approach for calculating grating structures, will be very slow in some cases, as involved lots of matrix's eigenvalue problems. The use of finite-difference frequency-domain can avoid eigenvalue problem by introduce a large number of difference calculations.
Qiang Xiong, Shuqiang Chen, Yanfang Hu
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Combining diffraction efficiency measurements with RCWA for high-precision grating characterization
Modeling Aspects in Optical Metrology XDeblina Sabui, Joby Joseph
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Improved diffraction computation with a hybrid C-RCWA-method
SPIE Proceedings, 2009The Rigorous Coupled Wave Approach (RCWA) is acknowledged as a well established diffraction simulation method in electro-magnetic computing. Its two most essential applications in the semiconductor industry are in optical scatterometry and optical lithography simulation.
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