Patterning Fidelity Enhancement and Aberration Mitigation in EUV Lithography Through Source-Mask Optimization. [PDF]
Wang Q, Wu Q, Li Y, Liu X, Li Y.
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A high transmission tender X-ray monochromator employing a matched pair of multilayer grating and mirror. [PDF]
Dennetiere D +11 more
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ZenBand: a numerical solver of photonic crystals with a graphical user interface. [PDF]
Zinkevičius A +2 more
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Temperature-Dependent Infrared Engineering for Extreme Environments: All-Dielectric Thermal Photonic Metamaterials Stable at 1873 K in Air. [PDF]
Liu Y +7 more
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Design of Polymeric 3D Printable Materials for THz Technology Applications. [PDF]
Tosetto B +8 more
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Integrated, ultrafast all-optical polariton transistors with sub-wavelength grating microcavities. [PDF]
Tassan P +9 more
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Biomimetic Conical Microhole Architecture Enabling 18.4%-Efficient Silicon Solar Cells with Superior Durability. [PDF]
Ahn Y +5 more
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Impact of Phase Defects on the Aerial Image in High NA Extreme Ultraviolet Lithography. [PDF]
He K, Zeng Z.
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