Results 211 to 220 of about 106,837 (225)

Inductively-coupled-plasma reactive ion etching of single-crystal β-Ga2O3

, 2017
Liheng Zhang, A. Verma, H. Xing, D. Jena
semanticscholar   +1 more source

Investigations on diamond nanostructuring of different morphologies by the reactive-ion etching process and their potential applications.

ACS Applied Materials and Interfaces, 2013
S. Kunuku, K. J. Sankaran, Cheng-Yen Tsai, Wen‐Hao Chang, N. Tai, K. Leou, I. Lin   +6 more
semanticscholar   +1 more source

Reactive Ion Etching of Copper Films

Journal of The Electrochemical Society, 1983
P. M. Schaible, G. C. Schwartz
openaire   +2 more sources

Fabrication of silicon nanostructures with large taper angle by reactive ion etching

, 2014
F. Saffih, Celal Con, Alanoud Alshammari, M. Yavuz, B. Cui   +4 more
semanticscholar   +1 more source

Surface Modification of Absorbable Magnesium Stents by Reactive Ion Etching

Plasma chemistry and plasma processing, 2013
E. Galvin, M. Morshed, C. Cummins, S. Daniels, C. Lally, B. MacDonald   +5 more
semanticscholar   +1 more source

Plasma and Reactive Ion Etching

2001
openaire   +2 more sources

A novel non-sequential hydrogen-pulsed deep reactive ion etching of silicon

, 2013
M. Gharooni, A. Mohajerzadeh, A. Sandoughsaz, S. Khanof, S. Mohajerzadeh, E. Asl-Soleimani   +5 more
semanticscholar   +1 more source

Formation of silicon grass: Nanomasking by carbon clusters in cyclic deep reactive ion etching

, 2011
S. Leopold, C. Kremin, A. Ulbrich, S. Krischok, M. Hoffmann   +4 more
semanticscholar   +1 more source

Ultrahigh throughput silicon nanomanufacturing by simultaneous reactive ion synthesis and etching.

ACS Nano, 2011
Yi Chen, Zhida Xu, M. Gartia, Daren Whitlock, Y. Lian, Gang Logan Liu   +5 more
semanticscholar   +1 more source

Reactive ion etching of crystalline quartz

Thin Solid Films, 1981
B.G. Pantchev, P. Danesh
openaire   +2 more sources