Results 281 to 287 of about 1,889,328 (287)

REACTIVE ION ETCHING

1992
openaire   +1 more source

Reactive ion etching device

1995
OHMI TADAHIRO, KASAMA YASUHIKO, FUKUI HIROBUMI   +2 more
openaire   +1 more source

REACTIVE ION ETCHING METHOD

1987
YOSHIDA, YUKIMASA C/O PATENT DIVISION, WATANABE, TOHRU C/O PATENT DIVISION   +1 more
openaire   +2 more sources

A REACTIVE ION ETCHING PROCESS

2000
RUANO-LOPEZ JESUS MIGUEL, BONAR JAMES RONALD, MCLAUGHLIN ANDREW JAMES, DA SILVA MARQUES PAULO VICENTE, JUBBER MICHAEL GEORGE, WILKINSON CHRISTOPHER D W, AITCHISON JAMES STEWART   +6 more
openaire   +1 more source

Deep Reactive Ion Silicon Etching

2011
openaire   +1 more source

DRIE (Deep Reactive Ion Etching)

2008
openaire   +1 more source

REACTIVE ION ETCHING APPARATUS

1990
KOSHIBA, MITSUNOBU, YAMADA, KEIICHI, HARITA, YOSHIYUKI, KAWAMURA, SHIN'ICHI, FURUTO, YUUJI   +4 more
openaire   +1 more source