Results 231 to 240 of about 14,556 (247)

Resonant Microibeam Accelerometers

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95, 2005
E.W. Bums, R.D. Homing, W.R. Herb, J.D. Zook, H. Guckel   +4 more
openaire   +1 more source

Micro Leverage Design of Silicon Resonant Accelerometer

2019
This paper designs a leverage structure of the silicon resonant accelerometer. The mathematical model of the micro leverage magnifying structure is established firstly. According to the model, the pivot beam of the micro leverage is designed, then its parameters are optimized to realize the magnifying function of the micro leverage mechanism.
Yan Li, Xinrui Zhang
openaire   +1 more source

RESONANT ACCELEROMETER IN MICROMACHINED SILICON

Sensors and Microsystems, 2005
FAGNANI G., FERRARI, Vittorio, GHISLA, Alessio, MARIOLI, Daniele, TARONI, Andrea   +4 more
openaire   +2 more sources

A sensitive micromachined resonant accelerometer for moving-base gravimetry

Sensors and Actuators A: Physical, 2021
Zhengxiang Fang, Yonggang Yin, Chen Chen
exaly  

Resonant accelerometer

The Journal of the Acoustical Society of America, 1989
openaire   +1 more source

Analysis of Temperature Stability and Change of Resonant Frequency of a Capacitive MEMS Accelerometer

International Journal of Precision Engineering and Manufacturing, 2022
Sung-Hoon Choa
exaly  

Temperature compensation for MEMS resonant accelerometer based on genetic algorithm optimized backpropagation neural network

Sensors and Actuators A: Physical, 2020
Shu-Dong Wang, Yajing Shen, Xueyong Wei
exaly  

Resonant-Frequency-Adjustable Fiber Bragg Grating Accelerometer Based on Extra Transverse Force Loading

IEEE Sensors Journal, 2023
Yilin Wang, Yizhuo Li, Fengyi Chen
exaly  

A MEMS piezoelectric in-plane resonant accelerometer based on aluminum nitride with two-stage microleverage mechanism

Sensors and Actuators A: Physical, 2017
Hong Ding, Xianhao Le, Wen Wang
exaly  

A MEMS resonant accelerometer for low-frequency vibration detection

Sensors and Actuators A: Physical, 2018
Shu-Dong Wang, Xueyong Wei, Yajing Shen
exaly