Results 221 to 230 of about 14,556 (247)

High-sensitivity fiber optic graphene resonant accelerometer

Optics Letters
This study proposes a high-sensitivity resonant graphene accelerometer based on a pressure-induced sensing mechanism. The accelerometer design encompasses an optical fiber and a vacuum-sealed graphene resonator affixed to a silicon sensitive film, incorporating a proof mass.
Yujian Liu, Cheng Li, Jing Li, Zhen Wan, Shangchun Fan   +4 more
openaire   +2 more sources

Resonant MEMS Accelerometer With CW Laser Excitation

Journal of Microelectromechanical Systems, 2020
A silicon MEMS resonator which forms an optical cavity with its package is self-excited and interrogated with a CW laser beam at telecom wavelengths delivered to the device through optical fiber. Self-oscillation at 68 kHz occurs with a buckled resonator for laser powers >7 mW.
William A. Challener, Ansas M. Kasten, Mengli Wang, David Lin, Sergei Zotov, Russell Craddock, Marco Aimi   +6 more
openaire   +1 more source

Sensitive Structure Design of Resonant Accelerometer

2019
In this paper, the sensitive structure of resonant accelerometer is optimized. The working principle of the resonant accelerometer, the sensitive mechanism of the sensitive structure and the mechanical model of the resonant tuning fork are analyzed. Based on these theories, it is answered what influence is the structural parameters of the sensitive ...
Yan Li, Zhuoni Zhang
openaire   +1 more source

A novel resonant accelerometer based on mode localization of weakly coupled resonators

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015
This paper describes a novel MEMS resonant accelerometer based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. To the best of the authors' knowledge, it is the first time that this principle is experimentally demonstrated for an accelerometer.
Zhang, Hemin, Yuan, W.Z., Li, B.Y., Hao, Y.C., Kraft, Michael, Chang, Honglong   +5 more
openaire   +2 more sources

A vacuum packaged surface micromachined resonant accelerometer

Journal of Microelectromechanical Systems, 2002
This paper describes the operation of a vacuum packaged resonant accelerometer subjected to static and dynamic acceleration testing. The device response is in broad agreement with a new analytical model of its behavior under an applied time-varying acceleration.
A.A. Seshia, M. Palaniapan, T.A. Roessig, R.T. Howe, R.W. Gooch, T.R. Schimert, S. Montague   +6 more
openaire   +1 more source

MEMS biaxial resonant accelerometer

2011
A microelectromechanical detection structure for a MEMS resonant biaxial accelerometer is provided with: an inertial mass, anchored to a substrate by means of elastic elements in such a way as to be suspended above the substrate, the elastic elements enabling inertial movements of detection of the inertial mass along a first axis of detection and a ...
COMI, CLAUDIA, CORIGLIANO, ALBERTO, B. Simoni   +2 more
openaire   +1 more source

Design and Analysis of Resonator for the Resonant Accelerometer

2017
This paper investigates the design and analysis of resonator for the resonant accelerometer. The difference in the resonator resonant frequency in driving and sensing mode and the resonator sensitivity were found to be key factors in determining the performance of the resonant accelerometer.
Yan Li, Xi Chen, Yunjiu Zhang
openaire   +1 more source

(Invited) Equivalent Circuit Representation of Resonant Accelerometer

ECS Transactions, 2013
The equivalent RLC circuit for the resonant accelerometer isdescribed in detail, which shows that equivalent circuit containstwo variable capacitances and two variable resistances due to theacceleration and amplitude. Using the electromechanical couplingfactor presented here and the mode function of the transversedeflection vibration of the double ...
Yubin Jia, Yilong Hao, Qinwen Huang
openaire   +1 more source

Resonant accelerometer

The Journal of the Acoustical Society of America, 1990
Roger T. Howe, Shih-Chia Chang
openaire   +1 more source

Superconducting accelerometer using niobium-on-sapphire rf resonator

Review of Scientific Instruments, 1979
An accelerometer is described which uses a rf niobium-on-sapphire resonator as its sensor element. The accelerometer uses a magnetically levitated spool as a test mass and the spool modulates the inductance of the resonator; its position is servo controlled to maintain the resonator at the external rf excitation frequency.
openaire   +2 more sources