Results 201 to 210 of about 14,556 (247)

Hermetically encapsulated differential resonant accelerometer

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013
We demonstrate the first accelerometer with a resonant strain gauge displacement transducer fabricated in a wafer-scale encapsulation process. Co-fabrication of this device with ultra-stable resonators enables detection of acceleration, and measurement of temperature (for compensation), along with generation of the timing reference for acceleration ...
D. L. Christensen, C. H. Ahn, V. A. Hong, E. J. Ng, Y. Yang, B. J. Lee, T. W. Kenny   +6 more
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A photonic integrated resonant accelerometer

2016 IEEE Photonics Conference (IPC), 2016
We demonstrate a novel photonic integrated accelerometer having 6 μg/√Hz sensitivity. The device was realized by integrating millimeter-scale mechanical structures with sub-micron silicon photonics using a 200-mm silicon toolset. We review our initial results and discuss the potential realization of nano-g level performance in a chip-scale device.
Suraj Bramhavar, Dave Kharas, Paul W. Juodawlkis   +2 more
openaire   +1 more source

Compact biaxial micromachined resonant accelerometer

Journal of Micromechanics and Microengineering, 2013
This paper presents a biaxial silicon resonant microaccelerometer characterized by a high sensitivity and a low cross-axis sensitivity. The device has a detection structure with a single inertial mass and two pairs of resonating beams allowing for the simultaneous differential measurement of acceleration acting along two different axes.
CASPANI, ALESSANDRO, COMI, CLAUDIA, CORIGLIANO, ALBERTO, LANGFELDER, GIACOMO, TOCCHIO, ALESSANDRO   +4 more
openaire   +2 more sources

Bulk-micromachined silicon resonant accelerometer

2009 International Conference on Information and Automation, 2009
A micromechanical silicon resonant accelerometer (SRA) with micro leverage mechanism amplifying the inertial force is presented. SRA consists of a pair of double-ended tuning forks (DETF), a proof mass and a micro lever mechanism. Firstly??the relation between frequency shift and applied force of DETF is modeled with the classical Bernoulli-Euler beams
null Anping Qiu, null Yan Su, null Xinhua Zhu, null Qin Shi   +3 more
openaire   +1 more source

Design of a Resonant Accelerometer

Advanced Materials Research, 2012
A resonant accelerometer was designed in order to overcome low output precision characteristics of the sensors which were tested with analog signals. This accelerator has the advantages of good repeatability, high resolution and excellent stability. Relationship between linear acceleration and resonant frequency of the sensing unit was deduced and the ...
Jing Li, Shang Chun Fan, Zhan She Guo
openaire   +1 more source

Sealed-cavity resonant microbeam accelerometer

Sensors and Actuators A: Physical, 1996
Abstract Resonant microbeam strain-sensing elements have been combined with a highly symmetric multiwafer silicon microstructure to form the first micromachined accelerometer with a polysilicon resonant microbeam pickoff. The MARIMBA (micromachined resonant integrated microbeam accelerometer) uniquely combines bulk-micromachining with advanced ...
D.W Burns, R.D Horning, W.R Herb, J.D Zook, H Guckel   +4 more
openaire   +1 more source

Double resonator cantilever accelerometer

The Journal of the Acoustical Society of America, 1985
A digital quartz accelerometer includes a pair of spaced double-ended tuning forks fastened at one end to a base and at the other end through a spacer mass. Transverse movement of the resonator members stresses one and compresses the other, providing a differential frequency output which is indicative of acceleration.
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Double tuning-fork resonant accelerometer

Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004., 2005
The structure of a novel resonant accelerometer has been designed and fabricated; it includes: two double-ended tuning forks (DETF), a proof mass surrounding and extending around the two tuning forks; a four-leverage system amplifying inertial force; drive/sense combs.
null Jia Yu-bin, null Hao Yi-long, null Zhang Rong   +2 more
openaire   +1 more source

A new biaxial silicon resonant micro accelerometer

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, 2011
A new biaxial silicon resonant accelerometer characterized by a high sensitivity and a low cross-axis sensitivity is presented in this paper. The device allows for the simultaneous measure of acceleration acting along two different axes using two couples of resonating slender beams linked to two couples of flexible beams and to a proof mass.
COMI, CLAUDIA, CORIGLIANO, ALBERTO, LANGFELDER, GIACOMO, LONGONI, ANTONIO FRANCESCO, TOCCHIO, ALESSANDRO, B. Simoni   +5 more
openaire   +1 more source

Dynamic analysis of the resonator for resonant accelerometer

Sensor Review, 2018
PurposeThis paper aims to develop a resonant accelerometer for structure optimization. The dynamic analysis of the resonator for resonant accelerometer are investigated.Design/methodology/approachFirst, the working principle and mechanical model of the resonator are introduced.
Haoyu Wang, Yan Li
openaire   +1 more source