Results 181 to 190 of about 261,095 (203)
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Bulk-micromachined silicon resonant accelerometer
2009 International Conference on Information and Automation, 2009A micromechanical silicon resonant accelerometer (SRA) with micro leverage mechanism amplifying the inertial force is presented. SRA consists of a pair of double-ended tuning forks (DETF), a proof mass and a micro lever mechanism. Firstly??the relation between frequency shift and applied force of DETF is modeled with the classical Bernoulli-Euler beams
null Anping Qiu +3 more
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Compact biaxial micromachined resonant accelerometer
Journal of Micromechanics and Microengineering, 2013This paper presents a biaxial silicon resonant microaccelerometer characterized by a high sensitivity and a low cross-axis sensitivity. The device has a detection structure with a single inertial mass and two pairs of resonating beams allowing for the simultaneous differential measurement of acceleration acting along two different axes.
CASPANI, ALESSANDRO +4 more
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The Journal of the Acoustical Society of America, 1989
HOWE ROGER T, CHANG SHIH-CHIA
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HOWE ROGER T, CHANG SHIH-CHIA
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Design and analysis of micromechanical resonant accelerometer
2012 8th IEEE International Symposium on Instrumentation and Control Technology (ISICT) Proceedings, 2012A novel micro resonant accelerometer was designed for increasing the sensitivity of resonant accelerometer, which includes two double-ended tuning forks, a proof mass, two-leverage system amplifying inertial force, and drive/sense combs. Each tuning fork is electro-statically actuated and sensed at resonance using comb electrodes.
Jing Li +5 more
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The Journal of the Acoustical Society of America, 1990
Roger T. Howe, Shih-Chia Chang
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Roger T. Howe, Shih-Chia Chang
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RESONANT ACCELEROMETER IN MICROMACHINED SILICON
Sensors and Microsystems, 2005FAGNANI G. +4 more
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Resonant Microibeam Accelerometers
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95, 2005E.W. Bums +4 more
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A sensitive micromachined resonant accelerometer for moving-base gravimetry
Sensors and Actuators A: Physical, 2021Yonggang Yin +2 more
exaly
A MEMS resonant accelerometer for low-frequency vibration detection
Sensors and Actuators A: Physical, 2018Yajing Shen, Shudong Wang, Hanyue Liu
exaly