Results 191 to 200 of about 2,241 (208)

Compact biaxial micromachined resonant accelerometer

Journal of Micromechanics and Microengineering, 2013
This paper presents a biaxial silicon resonant microaccelerometer characterized by a high sensitivity and a low cross-axis sensitivity. The device has a detection structure with a single inertial mass and two pairs of resonating beams allowing for the simultaneous differential measurement of acceleration acting along two different axes.
CASPANI, ALESSANDRO, COMI, CLAUDIA, CORIGLIANO, ALBERTO, LANGFELDER, GIACOMO, TOCCHIO, ALESSANDRO   +4 more
openaire   +2 more sources

A measuring circuit for MEMS resonant accelerometer

Proceedings of IEEE Sensors, 2004., 2006
The MEMS accelerometer has characteristics of high precision, small volume, low cost and is easy to be integrated. It has received attention from many people. Focused on the measurement of MEMS resonant accelerometer signals, the article introduces a new method of measuring weak signals, and designs a relative difference frequency measurement circuit ...
null Pei Xu, null Jun Liu, null Wendong Zhang   +2 more
openaire   +1 more source

Hermetically encapsulated differential resonant accelerometer

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013
We demonstrate the first accelerometer with a resonant strain gauge displacement transducer fabricated in a wafer-scale encapsulation process. Co-fabrication of this device with ultra-stable resonators enables detection of acceleration, and measurement of temperature (for compensation), along with generation of the timing reference for acceleration ...
D. L. Christensen, C. H. Ahn, V. A. Hong, E. J. Ng, Y. Yang, B. J. Lee, T. W. Kenny   +6 more
openaire   +1 more source

A Novel Optical Microring Resonator Accelerometer

IEEE Sensors Journal, 2007
A unique optical accelerometer based on a microring resonator fabricated on a flexible substrate is experimentally demonstrated and its performance analyzed. This accelerometer measures the applied acceleration by measuring the shift of the resonant wavelength of the flexible microring resonator.
Bipin Bhola, William H. Steier
openaire   +1 more source

Bulk-micromachined silicon resonant accelerometer

2009 International Conference on Information and Automation, 2009
A micromechanical silicon resonant accelerometer (SRA) with micro leverage mechanism amplifying the inertial force is presented. SRA consists of a pair of double-ended tuning forks (DETF), a proof mass and a micro lever mechanism. Firstly??the relation between frequency shift and applied force of DETF is modeled with the classical Bernoulli-Euler beams
null Anping Qiu, null Yan Su, null Xinhua Zhu, null Qin Shi   +3 more
openaire   +1 more source

Double tuning-fork resonant accelerometer

Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004., 2005
The structure of a novel resonant accelerometer has been designed and fabricated; it includes: two double-ended tuning forks (DETF), a proof mass surrounding and extending around the two tuning forks; a four-leverage system amplifying inertial force; drive/sense combs.
null Jia Yu-bin, null Hao Yi-long, null Zhang Rong   +2 more
openaire   +1 more source

Sensitive Structure Design of Resonant Accelerometer

2019
In this paper, the sensitive structure of resonant accelerometer is optimized. The working principle of the resonant accelerometer, the sensitive mechanism of the sensitive structure and the mechanical model of the resonant tuning fork are analyzed. Based on these theories, it is answered what influence is the structural parameters of the sensitive ...
Yan Li, Zhuoni Zhang
openaire   +1 more source

Resonant accelerometer

The Journal of the Acoustical Society of America, 1990
Roger T. Howe, Shih-Chia Chang
openaire   +1 more source

Resonant Microibeam Accelerometers

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95, 2005
E.W. Bums, R.D. Homing, W.R. Herb, J.D. Zook, H. Guckel   +4 more
openaire   +1 more source

RESONANT ACCELEROMETER IN MICROMACHINED SILICON

Sensors and Microsystems, 2005
FAGNANI G., FERRARI, Vittorio, GHISLA, Alessio, MARIOLI, Daniele, TARONI, Andrea   +4 more
openaire   +2 more sources