Results 191 to 200 of about 14,556 (247)

Sensor-integrated hip and knee prostheses: advances, challenges, and future perspectives. [PDF]

open access: yesFront Bioeng Biotechnol
Wu XD   +5 more
europepmc   +1 more source

Resonant accelerometer with self-test

Sensors and Actuators A: Physical, 2001
A new resonant accelerometer is presented consisting of a doubly clamped beam coupled to a seismic mass. The beam is thermally excited by an implanted resistor and its vibration is sensed piezoresistively. An acceleration which deflects the seismic mass leads to characteristic strains inside the resonator, shifting its resonance frequency.
M. Aikele   +6 more
openaire   +3 more sources

A Seismic-Grade Resonant MEMS Accelerometer

Journal of Microelectromechanical Systems, 2014
We report on the characterization of a high-resolution micromachined resonant accelerometer fabricated in an SoI-microelectromechanical (MEMS) foundry process. A prototype device demonstrated scale factor of 142.8 Hz/m/s 2 , dynamic range of >140 dB, and noise-limited resolution that is comparable with existing high-resolution macroscale seismometers.
null Xudong Zou   +2 more
openaire   +3 more sources

Resonant Accelerometers Based on Nanomechanical Piezoresistive Transduction

2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 2021
We present the design, fabrication and characterization of a resonant accelerometer combining piezoresistive nanoresonators with a micrometric proof mass, achieving at the same time an exceptional frequency sensitivity (up to 10%/g) and a large bandwidth (1.5 kHz) with respect to conventional technologies.
Miani, Theo   +8 more
openaire   +2 more sources

Microwave resonator accelerometer

The Journal of the Acoustical Society of America, 1995
A microwave resonator accelerometer including a microwave resonant cavity having a predetermined resonant frequency; the cavity including a flexible portion; a proof mass fixed to the flexible portion for changing the geometry and establishing a new resonant frequency of the cavity in response to an acceleration force on the proof mass; a microwave ...
Anthony Petrovich, Marc Weinberg
openaire   +1 more source

A micromachined resonant accelerometer

SPIE Proceedings, 2006
Micromechanical resonant sensors are very attractive for high-precision measurement applications due to their high sensitivity, direct frequency output and large dynamic range. This paper presents a high accuracy micromechanical resonant accelerometer on basis of detailed investigation.
Jie Ren   +3 more
openaire   +1 more source

Accelerometer Transverse Resonance Effects

SAE Technical Paper Series, 1989
<div class="htmlview paragraph">This article describes experimentation showing that accelerometers can exhibit resonant frequencies in transverse axes which are lower in frequency than the resonances in the sensitive axis. These lower frequency transverse resonances can produce transverse sensitivities considerably higher than those the ...
Robert L. Kinzel, W. Tustin
openaire   +1 more source

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